Inventor · disambiguated record
Fumiya Takata
Also filed as: TAKATA FUMIYA
6 granted patents·4 pending applications·2 citations·filing 2020–2025
66Inventor score
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0187US11251048B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Feb 15, 2022·2 cites·19 claims
- 0263US12488990B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Dec 2, 2025·0 cites·16 claims
- 0360US12456626B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Oct 28, 2025·0 cites·20 claims
- 0450US2025246412A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0549US11062882B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Jul 13, 2021·0 cites·6 claims
- 0649US2025210370A1Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0749US2023107264A1Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0847US2024112927A1Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0946US11594398B2Apparatus and method for plasma processingTOKYO ELECTRON LTD·Filed 2020·Granted Feb 28, 2023·0 cites·12 claims
- 1045US11569094B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jan 31, 2023·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →