Inventor · disambiguated record
Galbokka Hewage Layan Savithra
Also filed as: SAVITHRA GALBOKKA HEWAGE LAYAN
3 granted patents·2 pending applications·13 citations·filing 2018–2025
66Inventor score
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0194US12116669B2Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film depositionLAM RES CORP·Filed 2021·Granted Oct 15, 2024·3 cites·18 claims
- 0290US11015247B2Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film depositionLAM RES CORP·Filed 2018·Granted May 25, 2021·6 cites·14 claims
- 0386US12334332B2Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursorsLAM RES CORP·Filed 2018·Granted Jun 17, 2025·4 cites·18 claims
- 0481US2025003074A1Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film depositionLAM RES CORP·Filed 2024·Application pending·0 cites
- 0564US2025149328A1Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursorsLAM RES CORP·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →