Inventor · disambiguated record

Gerardus Maria Johannes Wijnand Janssen

Also filed as: JANSSEN GERARDUS MARIA JOHANNE

1 granted patent·6 citations·filing 2007–2007

27Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0177US7605907B2Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration methodASML NETHERLANDS BV·Filed 2007·Granted Oct 20, 2009·6 cites·18 claims

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