Inventor · disambiguated record
George Mueller
Also filed as: MUELLER GEORGE · MUELLER GEORGE A
5 granted patents·465 citations·filing 1997–2000
86Inventor score
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0197US6178919B1Perforated plasma confinement ring in plasma reactorsLAM RES CORP·Filed 1998·Granted Jan 30, 2001·208 cites·34 claims
- 0288US6090304AMethods for selective plasma etchLAM RES CORP·Filed 1997·Granted Jul 18, 2000·104 cites·6 claims
- 0387US6506685B2Perforated plasma confinement ring in plasma reactorsLAM RES CORP·Filed 2000·Granted Jan 14, 2003·64 cites·18 claims
- 0477US6117786AMethod for etching silicon dioxide using fluorocarbon gas chemistryLAM RES CORP·Filed 1998·Granted Sep 12, 2000·63 cites·19 claims
- 0560US6410451B2Techniques for improving etching in a plasma processing chamberLAM RES CORP·Filed 1999·Granted Jun 25, 2002·26 cites·32 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →