Inventor · disambiguated record
Genichi Nanasaki
Also filed as: NANASAKI GENICHI
4 granted patents·2 pending applications·4 citations·filing 2013–2023
60Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0168US10010913B2Purging apparatus and purging method for substrate storage containerTOKYO ELECTRON LTD·Filed 2013·Granted Jul 3, 2018·3 cites·9 claims
- 0261US10133266B2Conveyance robot replacement apparatus and conveyance robot replacement methodTOKYO ELECTRON LTD·Filed 2015·Granted Nov 20, 2018·1 cites·11 claims
- 0353US2024178044A1Transfer system, processing system, and transfer methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0452US2023395421A1Mounting pad, mounting mechanism, and substrate transfer mechanismTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0550US12062557B2Substrate processing system and particle removal methodTOKYO ELECTRON LTD·Filed 2021·Granted Aug 13, 2024·0 cites·24 claims
- 0648US12285786B2Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning methodTOKYO ELECTRON LTD·Filed 2021·Granted Apr 29, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →