Inventor · disambiguated record
Genji Sakata
Also filed as: SAKATA GENJI
2 granted patents·2 pending applications·0 citations·filing 2008–2019
22Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0141US2010151150A1Plasma processing apparatus and manufacturing method of deposition-inhibitory memberULVAC INC·Filed 2008·Application pending·0 cites
- 0236US12014946B2Electrostatic chuck, vacuum processing apparatus, and substrate processing methodULVAC INC·Filed 2019·Granted Jun 18, 2024·0 cites·6 claims
- 0334US2014318608A1Solar cell manufacturing method and solar cellULVAC INC·Filed 2012·Application pending·0 cites
- 0416US8932896B2Solar cell manufacturing apparatus and solar cell manufacturing methodSAKATA GENJI·Filed 2011·Granted Jan 13, 2015·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →