Inventor · disambiguated record
George N. Steinberg
Also filed as: STEINBERG GEORGE · STEINBERG GEORGE N
9 granted patents·546 citations·filing 1975–1997
91Inventor score
Top patents by PatentIndex Score
9 records- 0198US4431898AInductively coupled discharge for plasma etching and resist strippingPERKIN ELMER CORP·Filed 1981·Granted Feb 14, 1984·162 cites·6 claims
- 0297US4368092AApparatus for the etching for semiconductor devicesPERKIN ELMER CORP·Filed 1981·Granted Jan 11, 1983·103 cites·7 claims
- 0392US4367114AHigh speed plasma etching systemPERKIN ELMER CORP·Filed 1981·Granted Jan 4, 1983·66 cites·28 claims
- 0487US6099056ANon-contact holder for wafer-like articlesIPEC PRECISION INC·Filed 1997·Granted Aug 8, 2000·92 cites·17 claims
- 0586US5298103AElectrode assembly useful in confined plasma assisted chemical etchingHUGHES AIRCRAFT CO·Filed 1993·Granted Mar 29, 1994·50 cites·13 claims
- 0681US5372674AElectrode for use in a plasma assisted chemical etching processHUGHES AIRCRAFT CO·Filed 1994·Granted Dec 13, 1994·41 cites·26 claims
- 0753US4032862AHigh power electrodeless gas arc lamp for pumping lasersPERKIN ELMER CORP·Filed 1975·Granted Jun 28, 1977·9 cites·14 claims
- 0849US5567255ASolid annular gas discharge electrodeINTEGRATED PROCESS EQUIPMENT C·Filed 1994·Granted Oct 22, 1996·19 cites·13 claims
- 0942US4473777AElectron emitter assemblyPERKIN ELMER CORP·Filed 1982·Granted Sep 25, 1984·4 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →