Inventor · disambiguated record
Gero Wittich
Also filed as: WITTICH GERO
6 granted patents·1 pending application·17 citations·filing 2011–2019
78Inventor score
Top patents by PatentIndex Score
7 records- 0191US9316929B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2013·Granted Apr 19, 2016·10 cites·22 claims
- 0290US10031423B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2017·Granted Jul 24, 2018·4 cites·20 claims
- 0372US9575224B2Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objectiveZEISS CARL SMT GMBH·Filed 2013·Granted Feb 21, 2017·3 cites·22 claims
- 0468US10684551B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2019·Granted Jun 16, 2020·0 cites·9 claims
- 0563US10317802B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2018·Granted Jun 11, 2019·0 cites·21 claims
- 0658US9746778B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2016·Granted Aug 29, 2017·0 cites·14 claims
- 0736US2011235015A1Illumination optics for euv microlithographyCarl Zeiss GmbH·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →