Inventor · disambiguated record
Ge Yuan
Also filed as: YUAN GE
4 granted patents·3 pending applications·6 citations·filing 2016–2024
66Inventor score
Top patents by PatentIndex Score
7 records- 0193US12062538B2Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvementLAM RES CORP·Filed 2020·Granted Aug 13, 2024·3 cites·32 claims
- 0293US11842888B2Removing metal contamination from surfaces of a processing chamberLAM RES CORP·Filed 2022·Granted Dec 12, 2023·1 cites·24 claims
- 0387US12191125B2Removing metal contamination from surfaces of a processing chamberLAM RES CORP·Filed 2023·Granted Jan 7, 2025·0 cites·18 claims
- 0473US10554017B2Method and device concerning III-nitride edge emitting laser diode of high confinement factor with lattice matched cladding layerUNIV YALE·Filed 2016·Granted Feb 4, 2020·2 cites·24 claims
- 0573US2022037132A1Removing metal contamination from surfaces of a processing chamberLAM RES CORP·Filed 2019·Application pending·0 cites
- 0673US2024429045A1Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvementLAM RES CORP·Filed 2024·Application pending·0 cites
- 0759US2025189938A1Method and system to automatically optimize well management in systems of wellsEXXONMOBIL TECHNOLOGY & ENGINEERING COMPANY·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →