Inventor · disambiguated record
Giulio Bottegal
Also filed as: BOTTEGAL GIULIO
1 granted patent·4 pending applications·1 citations·filing 2020–2023
16Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV5
Top patents by PatentIndex Score
5 records- 0175US11531274B2Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targetsASML NETHERLANDS BV·Filed 2020·Granted Dec 20, 2022·1 cites·14 claims
- 0250US2025021021A1Metrology calibration methodASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0350US2025244683A1Methods of metrology and associated devicesASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0442US2024337954A1A method of monitoring a measurement recipe and associated metrology methods and apparatusesASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0541US2024184219A1System and method to ensure parameter measurement matching across metrology toolsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →