Inventor · disambiguated record
Giovanni Luca Gattobigio
Also filed as: GATTOBIGIO GIOVANNI LUCA
24 granted patents·2 pending applications·13 citations·filing 2015–2025
92Inventor score
Files withASML NETHERLANDS BV26
Top patents by PatentIndex Score
26 records- 0192US11231653B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Jan 25, 2022·2 cites·20 claims
- 0287US10416571B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 17, 2019·4 cites·20 claims
- 0384US10551748B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Feb 4, 2020·3 cites·20 claims
- 0483US10969695B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Apr 6, 2021·2 cites·20 claims
- 0583US2025370347A1Fluid handling system, method and lithographic apparatusASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 0678US12242200B2Lithography apparatus and a method of manufacturing a deviceASML NETHERLANDS BV·Filed 2023·Granted Mar 4, 2025·0 cites·20 claims
- 0777US11860546B2Fluid handling structure for lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Jan 2, 2024·0 cites·20 claims
- 0875US11614689B2Fluid handling structure and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Mar 28, 2023·0 cites·20 claims
- 0975US10216100B2Inspection substrate and an inspection methodASML NETHERLANDS BV·Filed 2016·Granted Feb 26, 2019·2 cites·7 claims
- 1072US12429778B2Fluid handling system, method and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Sep 30, 2025·0 cites·20 claims
- 1171US11774857B2Lithography apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Oct 3, 2023·0 cites·20 claims
- 1270US11454892B2Fluid handling structure for lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Sep 27, 2022·0 cites·20 claims
- 1369US11809086B2Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Nov 7, 2023·0 cites·20 claims
- 1467US10859919B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Dec 8, 2020·0 cites·20 claims
- 1566US2021088912A1Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 1660US10571810B2Substrate table, a lithographic apparatus and a method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Feb 25, 2020·0 cites·20 claims
- 1758US11156921B2Fluid handling structure, lithographic apparatus, and method of using a fluid handling structureASML NETHERLANDS BV·Filed 2018·Granted Oct 26, 2021·0 cites·20 claims
- 1857US11029607B2Fluid handling structure for lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Jun 8, 2021·0 cites·20 claims
- 1956US10725390B2Inspection substrate and an inspection methodASML NETHERLANDS BV·Filed 2019·Granted Jul 28, 2020·0 cites·17 claims
- 2055US11720032B2Process tool and an inspection methodASML NETHERLANDS BV·Filed 2019·Granted Aug 8, 2023·0 cites·20 claims
- 2155US11372336B2Lithography apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 28, 2022·0 cites·21 claims
- 2253US10317804B2Substrate table, lithographic apparatus and method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jun 11, 2019·0 cites·20 claims
- 2351US11372339B1Device manufacturing method and computer programASML NETHERLANDS BV·Filed 2020·Granted Jun 28, 2022·0 cites·20 claims
- 2448US11086239B2Cleaning device and method of cleaningASML NETHERLANDS BV·Filed 2019·Granted Aug 10, 2021·0 cites·20 claims
- 2541US11143969B2Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Oct 12, 2021·0 cites·20 claims
- 2637US10095129B2Lithographic apparatus and a method of manufacturing a device using a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 9, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →