Inventor · disambiguated record
Givi Georgievitch Zukavishvili
Also filed as: ZUKAVISHVILI GIVI G · ZUKAVISHVILI GIVI GEORGIEVITCH
9 granted patents·1 pending application·71 citations·filing 2001–2006
87Inventor score
Files withASML NETHERLANDS BV10
Top patents by PatentIndex Score
10 records- 0183US7251012B2Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debrisASML NETHERLANDS BV·Filed 2003·Granted Jul 31, 2007·25 cites·53 claims
- 0273US6933510B2Radiation source, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Aug 23, 2005·16 cites·25 claims
- 0372USRE41362ERadiation source, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Jun 1, 2010·3 cites·67 claims
- 0467US7279690B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 9, 2007·2 cites·37 claims
- 0567US6667484B2Radiation source, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Dec 23, 2003·9 cites·20 claims
- 0665US8018574B2Lithographic apparatus, radiation system and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 13, 2011·2 cites·25 claims
- 0762US7208746B2Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Apr 24, 2007·9 cites·9 claims
- 0858US6818912B2Radiation source, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Nov 16, 2004·5 cites·40 claims
- 0937US7335900B2Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted Feb 26, 2008·0 cites·9 claims
- 1035US2005253092A1Radiation source, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →