Inventor · disambiguated record
Glenn D. Kubiak
Also filed as: KUBIAK GLENN D
9 granted patents·391 citations·filing 1980–2006
91Inventor score
Top patents by PatentIndex Score
9 records- 0196US6285737B1Condenser for extreme-UV lithography with discharge sourceEUV LLC·Filed 2000·Granted Sep 4, 2001·116 cites·24 claims
- 0294US6031598AExtreme ultraviolet lithography machineEUV LLC·Filed 1998·Granted Feb 29, 2000·148 cites·20 claims
- 0384US6396068B1Illumination system having a plurality of movable sourcesEUV LLC·Filed 2000·Granted May 28, 2002·32 cites·21 claims
- 0473US6007963AMethod for extreme ultraviolet lithographySANDIA CORP·Filed 1997·Granted Dec 28, 1999·28 cites·1 claims
- 0569US6563907B1Radiation source with shaped emissionEUV LLC·Filed 2001·Granted May 13, 2003·12 cites·34 claims
- 0663US4330360AMolecular beam deposition technique using gaseous sources of group V elementsBELL TELEPHONE LABOR INC·Filed 1980·Granted May 18, 1982·26 cites·9 claims
- 0760US7239443B2Condenser optic with sacrificial reflective surfaceEUV LLC·Filed 2006·Granted Jul 3, 2007·5 cites·16 claims
- 0856US7081992B2Condenser optic with sacrificial reflective surfaceEUV LLC·Filed 2004·Granted Jul 25, 2006·11 cites·19 claims
- 0945US6011267AErosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sourcesEUV LLC·Filed 1998·Granted Jan 4, 2000·13 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →