Inventor · disambiguated record
Glen T. Mori
Also filed as: MORI GLEN · MORI GLEN T
26 granted patents·11 pending applications·845 citations·filing 1997–2025
96Inventor score
Top patents by PatentIndex Score
37 records- 0198US9171714B2Integrated processing of porous dielectric, polymer-coated substrates and epoxy within a multi-chamber vacuum system confirmationAPPLIED MATERIALS INC·Filed 2013·Granted Oct 27, 2015·521 cites·10 claims
- 0293US6777045B2Chamber components having textured surfaces and method of manufactureAPPLIED MATERIALS INC·Filed 2001·Granted Aug 17, 2004·63 cites·35 claims
- 0393US6416634B1Method and apparatus for reducing target arcing during sputter depositionAPPLIED MATERIALS INC·Filed 2000·Granted Jul 9, 2002·56 cites·24 claims
- 0492US9425076B2Substrate transfer robot end effectorAPPLIED MATERIALS INC·Filed 2014·Granted Aug 23, 2016·14 cites·18 claims
- 0586US10629430B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2018·Granted Apr 21, 2020·4 cites·22 claims
- 0682US6001227ATarget for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such targetAPPLIED MATERIALS INC·Filed 1997·Granted Dec 14, 1999·40 cites·30 claims
- 0781US2025385123A1Modular substrate support assemblyAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0878US12424481B2Modular substrate support assemblyAPPLIED MATERIALS INC·Filed 2024·Granted Sep 23, 2025·0 cites·15 claims
- 0978US9960035B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2017·Granted May 1, 2018·2 cites·20 claims
- 1078US6428663B1Preventing defect generation from targets through applying metal spray coatings on sidewallsAPPLIED MATERIALS INC·Filed 2000·Granted Aug 6, 2002·19 cites·15 claims
- 1177US9548200B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 17, 2017·3 cites·18 claims
- 1276US10431489B2Substrate support apparatus having reduced substrate particle generationAPPLIED MATERIALS INC·Filed 2014·Granted Oct 1, 2019·3 cites·20 claims
- 1376US6933025B2Chamber having components with textured surfaces and method of manufactureAPPLIED MATERIALS INC·Filed 2004·Granted Aug 23, 2005·32 cites·10 claims
- 1473US10312127B2Compliant robot blade for defect reductionAPPLIED MATERIALS INC·Filed 2014·Granted Jun 4, 2019·2 cites·13 claims
- 1571US9147558B2Finned shutter disk for a substrate process chamberAPPLIED MATERIALS INC·Filed 2013·Granted Sep 29, 2015·2 cites·20 claims
- 1669US2025370426A1Methods for troubleshooting substrate defects using machine learningAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1769US2025370845A1Methods for troubleshooting substrate defects using machine learningAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1867US6228186B1Method for manufacturing metal sputtering target for use in DC magnetron so that target has reduced number of conduction anomaliesAPPLIED MATERIALS INC·Filed 1999·Granted May 8, 2001·23 cites·37 claims
- 1967US6116032AMethod for reducing particulate generation from regeneration of cryogenic vacuum pumpsAPPLIED MATERIALS INC·Filed 1999·Granted Sep 12, 2000·25 cites·20 claims
- 2065US9051655B2Boron ionization for aluminum oxide etch enhancementAPPLIED MATERIALS INC·Filed 2013·Granted Jun 9, 2015·1 cites·11 claims
- 2165US2025214176A1Manifold for material removal systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2262US9954051B2Structure and method of fabricating three-dimensional (3D) metal-insulator-metal (MIM) capacitor and resistor in semi-additive plating metal wiringSEE GUAN HUEI·Filed 2016·Granted Apr 24, 2018·1 cites·21 claims
- 2362US9269562B2In situ chamber clean with inert hydrogen helium mixture during wafer processAPPLIED MATERIALS INC·Filed 2013·Granted Feb 23, 2016·1 cites·19 claims
- 2462US9177782B2Methods and apparatus for cleaning a substrateAPPLIED MATERIALS INC·Filed 2013·Granted Nov 3, 2015·1 cites·8 claims
- 2560US2025329559A1Load lock with diagnostic and remediation capabilitiesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2659US11348823B2Compliant robot blade for substrate support and transferAPPLIED MATERIALS INC·Filed 2019·Granted May 31, 2022·0 cites·8 claims
- 2758US6171455B1Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such targetAPPLIED MATERIALS INC·Filed 1999·Granted Jan 9, 2001·15 cites·24 claims
- 2855US6126791ATarget for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such targetAPPLIED MATERIALS INC·Filed 1999·Granted Oct 3, 2000·12 cites·25 claims
- 2955US2025069864A1Susceptor heat transferAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3054US6379428B1Method for reducing particle concentration within a semiconductor device fabrication toolAPPLIED MATERIALS INC·Filed 2000·Granted Apr 30, 2002·5 cites·20 claims
- 3153US11587799B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2020·Granted Feb 21, 2023·0 cites·8 claims
- 3251US2024249965A1Substrate support carrier having multiple ceramic discsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3349US2022181124A1Erosion resistant metal fluoride coatings, methods of preparation and methods of use thereofAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3446US2004222101A1Contact ring spin during idle time and deplate for defect reductionAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 3545US11289387B2Methods and apparatus for backside via reveal processingAPPLIED MATERIALS INC·Filed 2020·Granted Mar 29, 2022·0 cites·18 claims
- 3638US2007080067A1Pre-treatment to eliminate the defects formed during electrochemical platingAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 3737US2004118697A1Metal deposition process with pre-cleaning before electrochemical depositionAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →