Inventor · disambiguated record
Glenn A. Pfefferkorn
Also filed as: PFEFFERKORN GLENN · PFEFFERKORN GLENN A
3 granted patents·107 citations·filing 1987–2000
76Inventor score
Top patents by PatentIndex Score
3 records- 0186US6436796B1Systems and methods for epitaxial processing of a semiconductor substrateMATTSON TECH INC·Filed 2000·Granted Aug 20, 2002·43 cites·30 claims
- 0268US4823735AReflector apparatus for chemical vapor deposition reactorsGEMINI RESEARCH INC·Filed 1987·Granted Apr 25, 1989·32 cites·32 claims
- 0360US6099650AStructure and method for reducing slip in semiconductor wafersCONCEPT SYSTEMS DESIGN INC·Filed 1998·Granted Aug 8, 2000·32 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →