Inventor · disambiguated record
Grigory Pyatigorsky
Also filed as: PYATIGORSKY GRIGORY
7 granted patents·626 citations·filing 1994–2012
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0197US5964643AApparatus and method for in-situ monitoring of chemical mechanical polishing operationsAPPLIED MATERIALS INC·Filed 1996·Granted Oct 12, 1999·458 cites·15 claims
- 0290US7841926B2Substrate polishing metrology using interference signalsAPPLIED MATERIALS INC·Filed 2010·Granted Nov 30, 2010·8 cites·12 claims
- 0387US7731566B2Substrate polishing metrology using interference signalsAPPLIED MATERIALS INC·Filed 2007·Granted Jun 8, 2010·8 cites·10 claims
- 0487US5459632AReleasing a workpiece from an electrostatic chuckAPPLIED MATERIALS INC·Filed 1994·Granted Oct 17, 1995·96 cites·11 claims
- 0579US8092274B2Substrate polishing metrology using interference signalsBIRANG MANOOCHER·Filed 2010·Granted Jan 10, 2012·3 cites·6 claims
- 0679US5612850AReleasing a workpiece from an electrostatic chuckAPPLIED MATERIALS INC·Filed 1995·Granted Mar 18, 1997·52 cites·4 claims
- 0768US8556679B2Substrate polishing metrology using interference signalsBIRANG MANOOCHER·Filed 2012·Granted Oct 15, 2013·1 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →