Inventor · disambiguated record
Gunnar A. Barnhart
Also filed as: BARNHART GUNNAR A
5 granted patents·1 pending application·52 citations·filing 1998–2006
76Inventor score
Files withMICRON TECHNOLOGY INC6
Top patents by PatentIndex Score
6 records- 0173US6100198APost-planarization, pre-oxide removal ozone treatmentMICRON TECHNOLOGY INC·Filed 1998·Granted Aug 8, 2000·44 cites·30 claims
- 0252US6632743B1Post-planarization, pre-oxide removal ozone treatmentMICRON TECHNOLOGY INC·Filed 2000·Granted Oct 14, 2003·4 cites·20 claims
- 0340US2006205324A1Systems and methods for actuating end effectors to condition polishing pads used for polishing microfeature workpiecesMICRON TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 0437US6568999B2Method and apparatus for cleaning a surface of a microelectronic substrateMICRON TECHNOLOGY INC·Filed 2001·Granted May 27, 2003·0 cites·33 claims
- 0534US7077722B2Systems and methods for actuating end effectors to condition polishing pads used for polishing microfeature workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Jul 18, 2006·0 cites·22 claims
- 0631US6406358B1Method and apparatus for cleaning a surface of a microelectronic substrateMICRON TECHNOLOGY INC·Filed 1999·Granted Jun 18, 2002·4 cites·72 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →