Systems and methods for actuating end effectors to condition polishing pads used for polishing microfeature workpieces

Abstract

Systems and methods for activating end effectors used to condition microfeature workpiece polishing pads are disclosed. A system in accordance with one embodiment of the invention includes a rotatable end effector having a conditioning surface configured to condition a microfeature workpiece polishing medium, and a driver coupled to the end effector to rotate the end effector. The driver does not include a flexible, continuous belt coupled to the end effector. For example, the driver can include a motor-driven worm meshed with a worm gear. The system can further include a forcing element coupled to the end effector to apply a force to the end effector that is at least approximately normal to a conditioning surface of the end effector. The forcing element can include a first generally rigid member and a second generally rigid member coupled to the end effector and movable relative to the first generally rigid member to apply the force.

1 - 44 . (canceled)  
   
   
       45 . A method for manufacturing a system having features for conditioning microfeature workpiece polishing media, the method comprising: 
 providing a rotatable end effector having a conditioning surface configured to condition a microfeature workpiece polishing medium;    positioning a forcing device at least proximate to the end effector, the forcing device including a first generally rigid member and a second generally rigid member operatively coupled to the first generally rigid member, at least one of the generally rigid members being movable relative to the other; and    coupling the second generally rigid member to the end effector so that movement of the at least one member relative to the other applies an at least approximately normal force to the conditioning surface of the end effector, and so that at least one of the generally rigid members is rotatable with the end effector.    
   
   
       46 . The method of  claim 45  wherein one of the first and second generally rigid members includes a cylinder and wherein the other of the first and second generally rigid members includes a piston slideably received in the cylinder, and wherein coupling the second member includes coupling one of the piston and the cylinder to the end effector.  
   
   
       47 . The method of  claim 45  wherein positioning a forcing device includes positioning the forcing device so that both the first and second generally rigid members are rotatable with the end effector.  
   
   
       48 . The method of  claim 45  wherein positioning a forcing device includes positioning a rack and pinion system.  
   
   
       49 . A method for retrofitting a system having features for conditioning microfeature workpiece polishing media, the method comprising: 
 removing a flexible, continuous belt coupled between an end effector and a motor, the end effector having a conditioning surface configured to condition a microfeature workpiece polishing medium; and    coupling a driver to the end effector to rotate the end effector, wherein the driver does not include a flexible, continuous belt coupled to the end effector.    
   
   
       50 . The method of  claim 49  wherein coupling a driver includes: 
 connecting a first gear to the motor;    connecting a second gear to the end effector; and    coupling the first gear to the second gear without a flexible continuous belt.    
   
   
       51 . The method of  claim 49  wherein coupling a drive system includes: 
 connecting a first gear to the motor;    connecting a second gear to the end effector; and    engaging the first gear with the second gear.    
   
   
       52 . A method for retrofitting a system having features for conditioning microfeature workpiece polishing media, the method comprising: 
 removing a flexible bladder coupled to an end effector and a motor, the end effector having a conditioning surface configured to condition a microfeature workpiece polishing medium, the flexible bladder being configured to force the conditioning surface against the microfeature workpiece polishing medium; and    coupling a forcing device to the end effector, the forcing device including a first generally rigid member and a second generally rigid member, the second generally rigid member being operatively coupled to the first generally rigid member and coupled to the end effector, at least one of the generally rigid members being movable relative to the other to apply a force to the end effector that is at least approximately normal to the conditioning surface at least one of the generally rigid members being rotatable with the end effector.    
   
   
       53 . The method of  claim 52  wherein one of the first and second generally rigid members includes a cylinder and wherein the other of the first and second generally rigid members includes a piston slideably received in the cylinder, and wherein coupling the second member includes coupling one of the piston and the cylinder to the end effector.  
   
   
       54 . The method of  claim 52  wherein positioning a forcing device includes positioning a rack and pinion system.  
   
   
       55 . A method for operating a system having features for conditioning microfeature workpiece polishing media, the method comprising: 
 contacting an end effector with a polishing medium;    rotating the end effector relative to the polishing medium without driving a flexible, continuous belt coupled to the end effector; and    moving at least one of the end effector and the polishing medium relative to the other to condition the polishing medium.    
   
   
       56 . The method of  claim 55  wherein rotating the end effector includes rotating at least one shaft of the end effector and a head coupled to the at least one shaft, the head having a conditioning surface, and wherein rotating the end effector further includes: 
 activating a motor;    rotating a worm coupled to the motor;    rotating a worm gear engaged with the worm and coupled to the at least one shaft of the end effector, the worm being engaged with the worm gear to rotate the end effector when the motor is activated, and wherein the method further comprises:    forcing the conditioning surface against the polishing medium by moving at least one rigid element of a forcing mechanism coupled to the end effector relative to a second rigid element of the forcing mechanism to apply a force to the end effector that is at least approximately normal to the conditioning surface.    
   
   
       57 . The method of  claim 55  wherein rotating the end effector includes directing a high pressure fluid against an impeller coupled to the end effector.  
   
   
       58 . The method of  claim 55  wherein rotating the end effector includes: 
 activating a motor;    rotating a first gear coupled to the motor; and    rotating a second gear coupled to the end effector and engaged with the first gear.    
   
   
       59 . The method of  claim 55  wherein rotating the end effector includes: 
 activating a motor; and    driving a drive chain coupled between the motor and the end effector.    
   
   
       60 . The method of  claim 55 , further comprising: 
 contacting a microfeature workpiece with the polishing medium; and    removing material from the microfeature workpiece by moving at least one of the polishing medium and the microfeature workpiece relative to the other.    
   
   
       61 . A method for operating a system having features for conditioning microfeature workpiece polishing media, the method comprising: 
 contacting a conditioning surface of an end effector with a polishing medium;    applying an at least approximately normal force to the polishing medium with the conditioning surface by moving at least one generally rigid member of a forcing mechanism coupled to the end effector relative to another generally rigid member of the forcing mechanism while the generally rigid members are operatively coupled to each other; and    rotating the end effector and at least one of the generally rigid members together relative to the polishing medium.    
   
   
       62 . The method of  claim 61  wherein moving at least one generally rigid member includes moving a piston within a cylinder.  
   
   
       63 . The method of  claim 61  wherein moving at least one generally rigid member includes moving a rack relative to a pinion.  
   
   
       64 . A method for operating a system having features for conditioning microfeature workpiece polishing media, the method comprising: 
 contacting a conditioning surface of an end effector with a polishing medium;    applying an at least approximately normal force to the polishing medium with the conditioning surface;    rotating the end effector relative to the polishing medium with an electric motor; and    detecting a change in electrical energy drawn by the motor.    
   
   
       65 . The method of  claim 64 , further comprising halting rotation of the motor upon detecting at least a threshold change in electrical energy drawn by the motor.  
   
   
       66 . The system of  claim 64 , further comprising halting rotation of the motor upon detecting that a current drawn by the motor is below a threshold value.  
   
   
       67 . The method of  claim 64  wherein detecting a change in electrical energy includes detecting a change in current drawn by the motor.  
   
   
       68 . The method of  claim 64  wherein detecting a change in electrical energy includes detecting a change in power drawn by the motor.  
   
   
       69 . The method of  claim 64  wherein detecting a change in electrical energy drawn by the motor includes detecting a failure in a drive link between the motor and the end effector.