Inventor · disambiguated record
Güneş Nakibo{Hacek Over (G)}Lu
Also filed as: NAKIBO{HACEK OVER (G)}LU GÜNEŞ · NAKÌBO{HACEK OVER (G)}LU GÜNEŞ
6 granted patents·2 citations·filing 2016–2019
68Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0174US10495986B2Patterning device cooling system and method of thermally conditioning a patterning deviceASML NETHERLANDS BV·Filed 2017·Granted Dec 3, 2019·1 cites·22 claims
- 0269US10948825B2Method for removing photosensitive material on a substrateASML NETHERLANDS BV·Filed 2016·Granted Mar 16, 2021·1 cites·20 claims
- 0364US11036148B2Patterning device cooling system and method of thermally conditioning a patterning deviceASML NETHERLANDS BV·Filed 2019·Granted Jun 15, 2021·0 cites·21 claims
- 0461US10642166B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2019·Granted May 5, 2020·0 cites·20 claims
- 0548US11320751B2Apparatus incorporating a gas lockASML NETHERLANDS BV·Filed 2019·Granted May 3, 2022·0 cites·19 claims
- 0638US10775707B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2017·Granted Sep 15, 2020·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →