Inventor · disambiguated record
Gunsu Yun
Also filed as: YUN GUNSU
4 granted patents·41 citations·filing 2009–2010
73Inventor score
Top patents by PatentIndex Score
4 records- 0184US8340827B2Methods for controlling time scale of gas delivery into a processing chamberYUN GUNSU·Filed 2009·Granted Dec 25, 2012·29 cites·15 claims
- 0278US8989888B2Automatic fault detection and classification in a plasma processing system and methods thereofYUN GUNSU·Filed 2010·Granted Mar 24, 2015·7 cites·25 claims
- 0365US8650002B2Determining plasma processing system readiness without generating plasmaCHOI BRIAN·Filed 2009·Granted Feb 11, 2014·3 cites·17 claims
- 0461US8295966B2Methods and apparatus to predict etch rate uniformity for qualification of a plasma chamberCHOI BRIAN D·Filed 2010·Granted Oct 23, 2012·2 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →