Inventor · disambiguated record

H. Steven Larson

Also filed as: LARSON H STEVEN

2 granted patents·4 citations·filing 2013–2013

46Inventor score

Technology areasB01J B08B

Files withKLA TENCOR CORP2

Top patents by PatentIndex Score

2 records

0177US9573111B1High purity ozone generator for optics cleaning and recoveryKLA TENCOR CORP·Filed 2013·Granted Feb 21, 2017·3 cites·9 claims
0268US9662688B2Apparatus and method for cross-flow purge for optical components in a chamberKLA TENCOR CORP·Filed 2013·Granted May 30, 2017·1 cites·16 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →