Inventor · disambiguated record
Hans-Artur Boesser
Also filed as: BOESSER HANS-ARTUR
8 granted patents·6 pending applications·15 citations·filing 2005–2010
78Inventor score
Files withVISTEC SEMICONDUCTOR SYS GMBH10BOESSER HANS-ARTUR1KLA TENCOR MIE GMBH1MUETEC AUTOMATISIERTE MIKROSKO1VISTEC SEMICONDUCTOR SYSTEM GMBH1
Top patents by PatentIndex Score
14 records- 0171US7450246B2Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one directionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Nov 11, 2008·8 cites·20 claims
- 0267US7551296B2Method for determining the focal position of at least two edges of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jun 23, 2009·5 cites·13 claims
- 0347US7978340B2System and method for determining positions of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jul 12, 2011·1 cites·7 claims
- 0447US7961334B2Coordinate measuring machine for measuring structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jun 14, 2011·0 cites·5 claims
- 0546US7982950B2Measuring system for structures on a substrate for semiconductor manufactureVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jul 19, 2011·1 cites·8 claims
- 0640US8154595B2Device and method for automatic detection of incorrect measurements by means of quality factorsBOESSER HANS-ARTUR·Filed 2008·Granted Apr 10, 2012·0 cites·21 claims
- 0737US2006274934A1Apparatus and method for improving measuring accuracy in the determination of structural dataVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 0836US2006275017A1Apparatus and method for optically detecting an objectVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 0935US7864319B2Device and method for determining an optical property of a maskVISTEC SEMICONDUCTOR SYSTEM GMBH·Filed 2008·Granted Jan 4, 2011·0 cites·15 claims
- 1032US8351049B2Interferometric device for position measurement and coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2009·Granted Jan 8, 2013·0 cites·12 claims
- 1131US2010302555A1Metrology system and method for monitoring and correcting system generated errorsKLA TENCOR MIE GMBH·Filed 2010·Application pending·0 cites
- 1228US2009066970A1Arrangement and method for improving the measurement accuracy in the nm range for optical systemsMUETEC AUTOMATISIERTE MIKROSKO·Filed 2008·Application pending·0 cites
- 1327US2008259327A1Device for Inspecting a Microscopic ComponentVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Application pending·0 cites
- 1427US2007206279A1Device for inspecting a microscopic component by means of an immersion objectiveVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →