Inventor · disambiguated record
Haomiao Chang
Also filed as: CHANG HAOMIAO
1 granted patent·2 pending applications·0 citations·filing 2023–2024
6Inventor score
Files withKLA CORP3
Top patents by PatentIndex Score
3 records- 0159US12379672B2Metrology of nanosheet surface roughness and profileKLA CORP·Filed 2023·Granted Aug 5, 2025·0 cites·40 claims
- 0258US2025224344A1Measurements Of Semiconductor Structures Based On Data Collected At Prior Process StepsKLA CORP·Filed 2024·Application pending·0 cites
- 0358US2025123225A1Spectra delta metrologyKLA CORP·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →