Inventor · disambiguated record
Hanhong Chen
Also filed as: CHEN HANHONG
70 granted patents·15 pending applications·234 citations·filing 2007–2025
98Inventor score
Top patents by PatentIndex Score
85 records- 0195US8581318B1Enhanced non-noble electrode layers for DRAM capacitor cellINTERMOLECULAR INC·Filed 2013·Granted Nov 12, 2013·21 cites·20 claims
- 0295US8318572B1Inexpensive electrode materials to facilitate rutile phase titanium oxideSHANKER SUNIL·Filed 2010·Granted Nov 27, 2012·18 cites·26 claims
- 0392US8969169B1DRAM MIM capacitor using non-noble electrodesINTERMOLECULAR INC·Filed 2013·Granted Mar 3, 2015·13 cites·20 claims
- 0492US8435854B1Top electrode templating for DRAM capacitorMALHOTRA SANDRA·Filed 2011·Granted May 7, 2013·11 cites·21 claims
- 0591US11626281B2PEALD nitride filmsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 11, 2023·2 cites·18 claims
- 0691US9281357B2DRAM MIM capacitor using non-noble electrodesINTERMOLECULAR INC·Filed 2015·Granted Mar 8, 2016·7 cites·19 claims
- 0791US8415657B2Enhanced work function layer supporting growth of rutile phase titanium oxideRUI XIANGXIN·Filed 2010·Granted Apr 9, 2013·13 cites·12 claims
- 0889US12305283B2Dithering or dynamic offsets for improved uniformityAPPLIED MATERIALS INC·Filed 2024·Granted May 20, 2025·0 cites·12 claims
- 0989US8278735B2Yttrium and titanium high-k dielectric filmsHASHIM IMRAN·Filed 2010·Granted Oct 2, 2012·10 cites·22 claims
- 1088US8354702B1Inexpensive electrode materials to facilitate rutile phase titanium oxideELPIDA MEMORY INC·Filed 2010·Granted Jan 15, 2013·10 cites·20 claims
- 1188US8349696B1Asymmetric MIM capacitor for DRAM devicesINTERMOLECULAR INC·Filed 2011·Granted Jan 8, 2013·9 cites·20 claims
- 1287US8530348B1Integration of non-noble DRAM electrodeMALHOTRA SANDRA G·Filed 2012·Granted Sep 10, 2013·9 cites·16 claims
- 1385US10903056B2Plasma source for rotating susceptorAPPLIED MATERIALS INC·Filed 2018·Granted Jan 26, 2021·3 cites·19 claims
- 1485US8546236B2High performance dielectric stack for DRAM capacitorINTERMOLECULAR INC·Filed 2013·Granted Oct 1, 2013·5 cites·19 claims
- 1585US8440537B1Adsorption site blocking method for co-doping ALD filmsMALHOTRA SANDRA·Filed 2011·Granted May 14, 2013·6 cites·20 claims
- 1684US8481384B2Method for producing MIM capacitors with high K dielectric materials and non-noble electrodesCHEN HANHONG·Filed 2011·Granted Jul 9, 2013·6 cites·17 claims
- 1783US8737036B2Titanium based high-K dielectric filmsINTERMOLECULAR INC·Filed 2012·Granted May 27, 2014·4 cites·16 claims
- 1883US8581319B2Semiconductor stacks including catalytic layersINTERMOLECULAR INC·Filed 2013·Granted Nov 12, 2013·4 cites·17 claims
- 1983US8415227B2High performance dielectric stack for DRAM capacitorMALHOTRA SANDRA·Filed 2011·Granted Apr 9, 2013·5 cites·10 claims
- 2083US7968452B2Titanium-based high-K dielectric filmsINTERMOLECULAR INC·Filed 2009·Granted Jun 28, 2011·6 cites·20 claims
- 2182US8541868B2Top electrode templating for DRAM capacitorINTERMOLECULAR INC·Filed 2012·Granted Sep 24, 2013·4 cites·21 claims
- 2281US8809160B2Methods for forming high-K crystalline films and related devicesCHEN HANHONG·Filed 2011·Granted Aug 19, 2014·4 cites·20 claims
- 2381US8652927B2Integration of non-noble DRAM electrodeINTERMOLECULAR INC·Filed 2013·Granted Feb 18, 2014·5 cites·17 claims
- 2480US11586789B2Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformityAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·1 cites·13 claims
- 2579US11220747B2Complementary pattern station designsAPPLIED MATERIALS INC·Filed 2019·Granted Jan 11, 2022·2 cites·13 claims
- 2679US8476141B2High performance dielectric stack for DRAM capacitorINTERMOLECULAR INC·Filed 2013·Granted Jul 2, 2013·3 cites·9 claims
- 2778US8835273B2High temperature ALD process of metal oxide for DRAM applicationsCHEN HANHONG·Filed 2012·Granted Sep 16, 2014·3 cites·18 claims
- 2878US8815677B2Method of processing MIM capacitors to reduce leakage currentCHEN HANHONG·Filed 2011·Granted Aug 26, 2014·5 cites·14 claims
- 2978US8647943B2Enhanced non-noble electrode layers for DRAM capacitor cellCHEN HANHONG·Filed 2012·Granted Feb 11, 2014·4 cites·19 claims
- 3078US8541283B2High performance dielectric stack for DRAM capacitorINTERMOLECULAR INC·Filed 2013·Granted Sep 24, 2013·3 cites·20 claims
- 3177US12442080B2Plasma showerhead assembly and method of reducing defectsAPPLIED MATERIALS INC·Filed 2024·Granted Oct 14, 2025·0 cites·19 claims
- 3277US8828821B2Fabrication of semiconductor stacks with ruthenium-based materialsCHEN HANHONG·Filed 2009·Granted Sep 9, 2014·5 cites·14 claims
- 3376US12119221B2PEALD nitride filmsAPPLIED MATERIALS INC·Filed 2023·Granted Oct 15, 2024·0 cites·16 claims
- 3475US8901708B2Yttrium and titanium high-k dielectric filmsINTERMOLECULAR INC·Filed 2012·Granted Dec 2, 2014·2 cites·13 claims
- 3575US8486727B2System and method for step coverage measurementCHEN HANHONG·Filed 2010·Granted Jul 16, 2013·3 cites·20 claims
- 3674US11761083B2Methods for controlling a flow pulse shapeAPPLIED MATERIALS INC·Filed 2020·Granted Sep 19, 2023·0 cites·13 claims
- 3774US8829647B2High temperature ALD process for metal oxide for DRAM applicationsINTERMOLECULAR INC·Filed 2013·Granted Sep 9, 2014·2 cites·15 claims
- 3873US12077861B2Dithering or dynamic offsets for improved uniformityAPPLIED MATERIALS INC·Filed 2020·Granted Sep 3, 2024·0 cites·10 claims
- 3973US8551851B2Titanium-based high-K dielectric filmsCHEN HANHONG·Filed 2011·Granted Oct 8, 2013·2 cites·3 claims
- 4072US8813325B2Method for fabricating a DRAM capacitorRAMANI KARTHIK·Filed 2011·Granted Aug 26, 2014·3 cites·8 claims
- 4172US8772123B2Band gap improvement in DRAM capacitorsCHEN HANHONG·Filed 2011·Granted Jul 8, 2014·2 cites·19 claims
- 4272US8574999B2Blocking layers for leakage current reduction in DRAM devicesINTERMOLECULAR INC·Filed 2013·Granted Nov 5, 2013·2 cites·20 claims
- 4371US9178006B2Methods to improve electrical performance of ZrO2 based high-K dielectric materials for DRAM applicationsINTERMOLECULAR INC·Filed 2014·Granted Nov 3, 2015·3 cites·16 claims
- 4470US8674479B2Method for producing MIM capacitors with high K dielectric materials and non-noble electrodesINTERMOLECULAR INC·Filed 2013·Granted Mar 18, 2014·2 cites·17 claims
- 4569US8836002B2Method for fabricating a DRAM capacitorINTERMOLECULAR INC·Filed 2013·Granted Sep 16, 2014·2 cites·9 claims
- 4667US9224878B2High work function, manufacturable top electrodeINTERMOLECULAR INC·Filed 2012·Granted Dec 29, 2015·2 cites·16 claims
- 4767US2025316455A1Plasma showerhead assemblyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4866US9178010B2Adsorption site blocking method for co-doping ALD filmsINTERMOLECULAR INC·Filed 2012·Granted Nov 3, 2015·1 cites·16 claims
- 4966US8853049B2Single-sided non-noble metal electrode hybrid MIM stack for DRAM devicesDEWEERD WIM·Filed 2011·Granted Oct 7, 2014·2 cites·20 claims
- 5066US2023253186A1Peald titanium nitride with direct microwave plasmaAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
Showing the top 50 of 85 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →