Inventor · disambiguated record
Hao Chi
Also filed as: CHI HAO
1 granted patent·3 pending applications·0 citations·filing 2019–2024
13Inventor score
Technology areasH10P
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0171US2024387258A1Film stack simplification for high aspect ratio patterning and vertical scalingLAM RES CORP·Filed 2024·Application pending·0 cites
- 0254US12080592B2Film stack simplification for high aspect ratio patterning and vertical scalingLAM RES CORP·Filed 2019·Granted Sep 3, 2024·0 cites·8 claims
- 0352US2025118568A1Reduced temperature etching of doped silicon oxideLAM RES CORP·Filed 2023·Application pending·0 cites
- 0450US2025308894A1Hardmask for high aspect ratio dielectric etch at cryo and elevated temperaturesLAM RES CORP·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →