Inventor · disambiguated record
Hans-Peter Feuerbaum
Also filed as: FEUERBAUM HANS P · FEUERBAUM HANS-PETER
43 granted patents·1,412 citations·filing 1978–2006
98Inventor score
Files withSIEMENS AG23INTEGRATED CIRCUIT TESTING12APPLIED MATERIALS INC5ACT ADVANCED CIRCUIT TESTING1DEGENHARDT RALF1
Top patents by PatentIndex Score
43 records- 0198US7274018B2Charged particle beam apparatus and method for operating the sameINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Sep 25, 2007·162 cites·10 claims
- 0298US7045781B2Charged particle beam apparatus and method for operating the sameINTEGRATED CIRCUIT TESTING·Filed 2004·Granted May 16, 2006·214 cites·19 claims
- 0397US6943349B2Multi beam charged particle deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Sep 13, 2005·126 cites·28 claims
- 0495US4831266ADetector objective for particle beam apparatusSIEMENS AG·Filed 1987·Granted May 16, 1989·68 cites·22 claims
- 0595US4277679AApparatus and method for contact-free potential measurements of an electronic compositionSIEMENS AG·Filed 1979·Granted Jul 7, 1981·42 cites·7 claims
- 0692US7652263B2Focussing lens for charged particle beamsINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Jan 26, 2010·18 cites·23 claims
- 0792US4241259AScanning electron microscopeSIEMENS AG·Filed 1979·Granted Dec 23, 1980·32 cites·2 claims
- 0891US4812651ASpectrometer objective for particle beam measuring instrumentsSIEMENS AG·Filed 1987·Granted Mar 14, 1989·46 cites·18 claims
- 0990US6730907B1Charged particle deviceINTEGRATED CIRCUIT TESTING·Filed 2000·Granted May 4, 2004·33 cites·19 claims
- 1090US4713543AScanning particle microscopeSIEMENS AG·Filed 1985·Granted Dec 15, 1987·47 cites·23 claims
- 1188US6936817B2Optical column for charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Aug 30, 2005·27 cites·9 claims
- 1287US8203119B2Charged particle beam device with retarding field analyzerDEGENHARDT RALF·Filed 2005·Granted Jun 19, 2012·28 cites·43 claims
- 1387US4292519ADevice for contact-free potential measurementsSIEMENS AG·Filed 1979·Granted Sep 29, 1981·23 cites·3 claims
- 1484US7586093B2Apparatus and method for inspecting a sample of a specimen by means of an electron beamINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Sep 8, 2009·19 cites·24 claims
- 1584US6555815B2Apparatus and method for examining specimen with a charged particle beamAPPLIED MATERIALS INC·Filed 1999·Granted Apr 29, 2003·41 cites·63 claims
- 1684US5041724AMethod of operating an electron beam measuring deviceINTEGRATED CIRCUIT TESTING·Filed 1989·Granted Aug 20, 1991·29 cites·13 claims
- 1784US4220853AMethod for the contactless measurement of the potential waveform in an electronic component and arrangement for implementing the methodSIEMENS AG·Filed 1979·Granted Sep 2, 1980·33 cites·7 claims
- 1883US4220854AMethod for the contactless measurement of the potential waveform in an electronic component and apparatus for implementing the methodSIEMENS AG·Filed 1979·Granted Sep 2, 1980·29 cites·4 claims
- 1981US5422486AScanning electron beam deviceINTEGRATED CIRCUIT TESTING·Filed 1993·Granted Jun 6, 1995·47 cites·7 claims
- 2081US4413181AArrangement for stroboscopic potential measurements with an electron beam testing deviceSIEMENS AG·Filed 1981·Granted Nov 1, 1983·21 cites·4 claims
- 2178US4460866AMethod for measuring resistances and capacitances of electronic componentsSIEMENS AG·Filed 1981·Granted Jul 17, 1984·30 cites·4 claims
- 2278US4223220AMethod for electronically imaging the potential distribution in an electronic component and arrangement for implementing the methodSIEMENS AG·Filed 1979·Granted Sep 16, 1980·24 cites·4 claims
- 2378US4169229AApparatus for keying in electron beamsSIEMENS AG·Filed 1978·Granted Sep 25, 1979·16 cites·3 claims
- 2476US5780859AElectrostatic-magnetic lens arrangementACT ADVANCED CIRCUIT TESTING·Filed 1997·Granted Jul 14, 1998·30 cites·22 claims
- 2576US4808821ASpectrometer objective for electron beam mensuration techniquesSIEMENS AG·Filed 1986·Granted Feb 28, 1989·20 cites·10 claims
- 2676US4296372ATechniques for impressing a voltage with an electron beamSIEMENS AG·Filed 1979·Granted Oct 20, 1981·32 cites·6 claims
- 2774US5329125ADevice for corpuscular-optical examination and/or processing of material samplesINTEGRATED CIRCUIT TESTING·Filed 1992·Granted Jul 12, 1994·26 cites·5 claims
- 2870US4486660AElectron beam testing device for stroboscopic measurement of high-frequency, periodic eventsSIEMENS AG·Filed 1981·Granted Dec 4, 1984·14 cites·1 claims
- 2969US5834773AMethod and apparatus for testing the function of microstructure elementsEBETECH ELECTRON BEAM TECHNOLO·Filed 1996·Granted Nov 10, 1998·32 cites·19 claims
- 3068US7638777B2Imaging system with multi source arrayINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Dec 29, 2009·8 cites·22 claims
- 3168US6576908B1Beam column for charged particle beam deviceAPPLIED MATERIALS INC·Filed 1999·Granted Jun 10, 2003·20 cites·20 claims
- 3260US4514682ASecondary electron spectrometer for measuring voltages on a sample utilizing an electron probeSIEMENS AG·Filed 1982·Granted Apr 30, 1985·9 cites·1 claims
- 3356US7075092B2Charged particle beam microscope with minicolumnAPPLIED MATERIALS INC·Filed 2004·Granted Jul 11, 2006·2 cites·3 claims
- 3455US6555824B1Method and device for focusing a charged particle beamAPPLIED MATERIALS INC·Filed 1999·Granted Apr 29, 2003·10 cites·12 claims
- 3555US4683376AOpposing field spectrometer for electron beam mensuration technologyINTEGRATED CIRCUIT TESTING·Filed 1985·Granted Jul 28, 1987·14 cites·11 claims
- 3648US6740889B1Charged particle beam microscope with minicolumnAPPLIED MATERIALS INC·Filed 1998·Granted May 25, 2004·6 cites·28 claims
- 3747US4539477AMethod and apparatus for suppressing disturbances in the measurement of signals with a particle probeSIEMENS AG·Filed 1983·Granted Sep 3, 1985·9 cites·15 claims
- 3842US4733176AMethod and apparatus for locating defects in an electrical circuit with a light beamSIEMENS AG·Filed 1985·Granted Mar 22, 1988·8 cites·15 claims
- 3941US4651003AParticle-accelerating electrodeSIEMENS AG·Filed 1985·Granted Mar 17, 1987·4 cites·14 claims
- 4037US4471302AMethod for representing logical status changes of a plurality of adjacent circuit nodes in an integrated circuit in a logic image employing a pulsed electron probeSIEMENS AG·Filed 1982·Granted Sep 11, 1984·5 cites·3 claims
- 4135US4686466AMethod for automatically setting the voltage resolution in particle beam measuring devices and apparatus for implementation thereofSIEMENS AG·Filed 1985·Granted Aug 11, 1987·4 cites·6 claims
- 4234US4675602AMethod for automatically setting an operating point given signal curve measurements with a particle beam measuring apparatusSIEMENS AG·Filed 1985·Granted Jun 23, 1987·4 cites·6 claims
- 4319US4412191AMethod and arrangement for quantitative potential measurements on surface-wave filtersSIEMENS AG·Filed 1981·Granted Oct 25, 1983·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →