Inventor · disambiguated record
Harry P. Gillis
Also filed as: GILLIS HARRY P
9 granted patents·317 citations·filing 1987–2004
91Inventor score
Top patents by PatentIndex Score
9 records- 0191US6656568B1Ordered arrays of nanoclustersUNIV COLORADO·Filed 2000·Granted Dec 2, 2003·55 cites·7 claims
- 0286US5882538AMethod and apparatus for low energy electron enhanced etching of substratesGEORGIA TECH RES INST·Filed 1996·Granted Mar 16, 1999·51 cites·24 claims
- 0383US6258287B1Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environmentGEORGIA TECH RES INST·Filed 1997·Granted Jul 10, 2001·33 cites·18 claims
- 0483US6033587AMethod and apparatus for low energy electron enhanced etching and cleaning of substrates in the positive column of a plasmaGEORGIA TECH RES INST·Filed 1997·Granted Mar 7, 2000·41 cites·43 claims
- 0582US7431796B2Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environmentGEORGIA TECH RES INST·Filed 2004·Granted Oct 7, 2008·14 cites·8 claims
- 0682US6852195B2Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environmentGEORGIA TECH RES INST·Filed 2001·Granted Feb 8, 2005·14 cites·14 claims
- 0782US6027663AMethod and apparatus for low energy electron enhanced etching of substratesGEORGIA TECH RES INST·Filed 1998·Granted Feb 22, 2000·38 cites·10 claims
- 0875US4734158AMolecular beam etching system and methodHUGHES AIRCRAFT CO·Filed 1987·Granted Mar 29, 1988·45 cites·26 claims
- 0973US5917285AApparatus and method for reducing operating voltage in gas discharge devicesGEORGIA TECH RES INST·Filed 1997·Granted Jun 29, 1999·26 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →