Inventor · disambiguated record
Harlan I. Halsey
Also filed as: HALSEY HARLAN I
4 granted patents·1 pending application·219 citations·filing 1996–2004
81Inventor score
Top patents by PatentIndex Score
5 records- 0192US5855744ANon-planar magnet tracking during magnetron sputteringAPPLIED KOMATSU TECHNOLOGY INC·Filed 1996·Granted Jan 5, 1999·132 cites·42 claims
- 0282US6663025B1Diffuser and rapid cycle chamberLAM RES CORP·Filed 2001·Granted Dec 16, 2003·44 cites·37 claims
- 0380US6750155B2Methods to minimize moisture condensation over a substrate in a rapid cycle chamberLAM RES CORP·Filed 2002·Granted Jun 15, 2004·23 cites·17 claims
- 0475US6543981B1Apparatus and method for creating an ultra-clean mini-environment through localized air flow augmentationLAM RES CORP·Filed 2001·Granted Apr 8, 2003·20 cites·18 claims
- 0541US2004194268A1Rapid cycle chamber having a top vent with nitrogen purgeLAM RES CORP·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →