Inventor · disambiguated record
Haruhiko Kusunose
Also filed as: KUSUNOSE HARUHIKO
28 granted patents·6 pending applications·387 citations·filing 1992–2024
96Inventor score
Top patents by PatentIndex Score
34 records- 0193US6858859B2Optically scanning apparatus and defect inspection systemLASERTEC CORP·Filed 2002·Granted Feb 22, 2005·62 cites·27 claims
- 0292US6195202B1Laser microscope and a pattern inspection apparatus using such laser microscopeLASERTEC CORP·Filed 2000·Granted Feb 27, 2001·55 cites·17 claims
- 0390US9588421B2Pellicle inspection apparatusLASERTEC CORP·Filed 2015·Granted Mar 7, 2017·6 cites·12 claims
- 0488US6043932ALaser microscope and a pattern inspection apparatus using such laser microscopeLASERTEC CORP·Filed 1998·Granted Mar 28, 2000·77 cites·6 claims
- 0584US7907270B2Inspection apparatus and method, and production method for pattern substratesLASERTEC CORP·Filed 2008·Granted Mar 15, 2011·9 cites·15 claims
- 0681US9719859B2Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beamsLASERTEC CORP·Filed 2014·Granted Aug 1, 2017·3 cites·12 claims
- 0780US9117869B2Chucking device and chucking methodLASERTEC CORP·Filed 2014·Granted Aug 25, 2015·4 cites·14 claims
- 0877US6665326B2Light source deviceLASERTEC CORP·Filed 2001·Granted Dec 16, 2003·19 cites·9 claims
- 0976US6654110B2Image pickup apparatus and defect inspection apparatus for photomaskLASERTEC CORP·Filed 2002·Granted Nov 25, 2003·14 cites·12 claims
- 1075US7643157B2Phase shift amount measurement apparatus and transmittance measurement apparatusLASERTEC CORP·Filed 2007·Granted Jan 5, 2010·8 cites·17 claims
- 1173US10645289B2Optical apparatus and vibration removing methodLASERTEC CORP·Filed 2017·Granted May 5, 2020·1 cites·10 claims
- 1273US8760642B2Substrate inspection apparatus and mask inspection apparatusHORI ZENTA·Filed 2011·Granted Jun 24, 2014·6 cites·27 claims
- 1372US8305681B2Light source apparatusSAKUMA JUN·Filed 2010·Granted Nov 6, 2012·2 cites·17 claims
- 1471US9638739B2Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference maskLASERTEC CORP·Filed 2013·Granted May 2, 2017·2 cites·9 claims
- 1571US9013787B2Microscope and inspection apparatusLASERTEC CORP·Filed 2013·Granted Apr 21, 2015·2 cites·37 claims
- 1671US5426503AMethod of testing a phase shift mask and a testing apparatus used therein in the ultraviolet wavelength rangeMITSUBISHI ELECTRIC CORP·Filed 1994·Granted Jun 20, 1995·25 cites·7 claims
- 1768US10712287B2Inspection device and inspection methodLASERTEC CORP·Filed 2019·Granted Jul 14, 2020·1 cites·12 claims
- 1867US8069008B2Depth measurement apparatus and depth measurement methodKUSUNOSE HARUHIKO·Filed 2008·Granted Nov 29, 2011·7 cites·11 claims
- 1967US7796343B2Photomask inspection apparatusLASERTEC CORP·Filed 2007·Granted Sep 14, 2010·2 cites·14 claims
- 2067US7548309B2Inspection apparatus, inspection method, and manufacturing method of pattern substrateLASERTEC CORP·Filed 2008·Granted Jun 16, 2009·2 cites·16 claims
- 2166US5428203AElectron beam exposing apparatus with a stencil mask kept at a constant temperatureMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Jun 27, 1995·17 cites·6 claims
- 2265US12050184B2Mask inspection method and mask inspection apparatusLASERTEC CORP·Filed 2021·Granted Jul 30, 2024·0 cites·7 claims
- 2364US10706527B2Correction method, correction apparatus, and inspection apparatusLASERTEC CORP·Filed 2018·Granted Jul 7, 2020·1 cites·5 claims
- 2464US5772842AApparatus for stripping pellicleMITSUBISHI ELECTRIC CORP·Filed 1995·Granted Jun 30, 1998·33 cites·5 claims
- 2561US11353802B2Optical device, and method for preventing contamination of optical deviceLASERTEC CORP·Filed 2021·Granted Jun 7, 2022·0 cites·14 claims
- 2661US7764414B2Illumination apparatus and illumination methodLASERTEC CORP·Filed 2007·Granted Jul 27, 2010·2 cites·14 claims
- 2759US2024402592A1PhotodetectorLASERTEC CORP·Filed 2024·Application pending·0 cites
- 2855US2024361590A1Optical apparatus and method of preventing contamination of optical apparatusLASERTEC CORP·Filed 2024·Application pending·0 cites
- 2954US2024302670A1Illumination apparatus and illumination methodLASERTEC CORP·Filed 2024·Application pending·0 cites
- 3053US5771097AMach-zehnder type interferometerLASERTEC CORP·Filed 1996·Granted Jun 23, 1998·20 cites·14 claims
- 3145US2021247323A1Inspection device and inspection methodLASERTEC CORP·Filed 2021·Application pending·0 cites
- 3244US5275895AMethod of manufacturing phase-shifting maskMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Jan 4, 1994·7 cites·19 claims
- 3341US2013234597A1Plasma shield device and plasma source apparatusLASERTEC CORP·Filed 2013·Application pending·0 cites
- 3431US2011242312A1Inspection system and inspection methodLASERTEC CORP·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →