Inventor · disambiguated record
Hannu Leskinen
Also filed as: LESKINEN HANNU
5 granted patents·3 pending applications·495 citations·filing 2003–2010
85Inventor score
Top patents by PatentIndex Score
8 records- 0197US7021330B2Diaphragm valve with reliability enhancements for atomic layer depositionPLANAR SYSTEMS INC·Filed 2003·Granted Apr 4, 2006·384 cites·66 claims
- 0292US7141095B2Precursor material delivery system for atomic layer depositionPLANAR SYSTEMS INC·Filed 2003·Granted Nov 28, 2006·40 cites·36 claims
- 0384US6941963B2High-speed diaphragm valve for atomic layer depositionPLANAR SYSTEMS INC·Filed 2003·Granted Sep 13, 2005·31 cites·38 claims
- 0484US6907897B2Diaphragm valve for high-temperature precursor supply in atomic layer depositionPLANAR SYSTEMS INC·Filed 2003·Granted Jun 21, 2005·30 cites·50 claims
- 0582US7191793B2Diaphragm valve for atomic layer depositionPLANAR SYSTEMS INC·Filed 2006·Granted Mar 20, 2007·10 cites·33 claims
- 0656US2007089674A1Precursor material delivery system with thermal enhancements for atomic layer depositionPLANAR SYSTEMS INC·Filed 2006·Application pending·0 cites
- 0756US2007117383A1Precursor material delivery system with staging volume for atomic layer depositionPLANAR SYSTEMS INC·Filed 2006·Application pending·0 cites
- 0842US2011265720A1Gas deposition reactorBENEQ OY·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →