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BENEQ OY
FI42 patents
Top patents by PatentIndex Score
US10214813B2Feb 26, 2019
Apparatus and method for providing a coating to a surface of a substrate
BENEQ OY4 citations70
US9708710B2Jul 18, 2017
Atomic layer deposition method for coating a substrate surface using successive surface reactions with multiple precursors
BENEQ OY3 citations69
US9226362B2Dec 29, 2015
Transparent inorganic thin-film electroluminescent display element and method for manufacturing it
BENEQ OY5 citations67
US7922821B2Apr 12, 2011
Source, an arrangement for installing a source, and a method for installing and removing a source
BENEQ OY2 citations62
US11926896B2Mar 12, 2024
Atomic layer deposition apparatus
BENEQ OY0 citations60
US10273579B2Apr 30, 2019
Apparatus for processing two or more substrates in a batch process
BENEQ OY1 citations60
US8367561B2Feb 5, 2013
Method in depositing metal oxide materials
BENEQ OY3 citations59
USD998660SSep 12, 2023
Coating machine
BENEQ OY0 citations56
USD978933SFeb 21, 2023
Coating machine
BENEQ OY0 citations56
USD978932SFeb 21, 2023
Coating machine
BENEQ OY0 citations56
US11421319B2Aug 23, 2022
Plasma etch-resistant film and a method for its fabrication
BENEQ OY0 citations54
US10961620B2Mar 30, 2021
Plasma etch-resistant film and a method for its fabrication
BENEQ OY0 citations54
US11371146B2Jun 28, 2022
Gas distribution unit in connection with ALD reactor
BENEQ OY0 citations52
US11041243B2Jun 22, 2021
Coating precursor nozzle and a nozzle head
BENEQ OY0 citations52
US12180588B2Dec 31, 2024
Loading device, arrangement and method for loading a reaction chamber
BENEQ OY0 citations50
US12180587B2Dec 31, 2024
Vacuum chamber and arrangement for atomic layer deposition
BENEQ OY0 citations50
US12116668B2Oct 15, 2024
Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangement
BENEQ OY0 citations50
US12104248B2Oct 1, 2024
Gas feeding cup and a gas manifold assembly
BENEQ OY0 citations50
US9892814B2Feb 13, 2018
Method for forming an electrically conductive oxide film, an electrically conductive oxide film, and uses for the same
BENEQ OY1 citations49
US12460292B2Nov 4, 2025
Atomic layer deposition apparatus and a method
BENEQ OY0 citations48
US11702745B2Jul 18, 2023
Nozzle and nozzle head
BENEQ OY0 citations48
US11214866B2Jan 4, 2022
Nozzle head and apparatus
BENEQ OY0 citations48
US10023957B2Jul 17, 2018
Apparatus and method for processing substrate
BENEQ OY1 citations48
US11970773B2Apr 30, 2024
Apparatus and method for atomic layer deposition (ALD)
BENEQ OY0 citations47
US12590367B2Mar 31, 2026
Precursor supply chamber
BENEQ OY0 citations46
US11549702B2Jan 10, 2023
Precursor supply cabinet
BENEQ OY0 citations46
US10111300B2Oct 23, 2018
Display device and a method for manufacturing such device
BENEQ OY0 citations46
US12442081B2Oct 14, 2025
Nozzle head and apparatus
BENEQ OY0 citations45
US12000043B2Jun 4, 2024
Precursor source arrangement and atomic layer deposition apparatus
BENEQ OY0 citations45
US11634814B2Apr 25, 2023
Atomic layer deposition apparatus
BENEQ OY0 citations45
US10590536B2Mar 17, 2020
Apparatus, method and reaction chamber
BENEQ OY0 citations45
US9683291B2Jun 20, 2017
Apparatus for processing surface of substrate and nozzle head
BENEQ OY1 citations45
US11101334B2Aug 24, 2021
Thin film display element
BENEQ OY0 citations44
US11762510B2Sep 19, 2023
Display arrangement and method
BENEQ OY0 citations43
US9726372B2Aug 8, 2017
Burner nozzle, burner and a surface treatment device
BENEQ OY0 citations43
US10513776B2Dec 24, 2019
Method for coating a substrate
BENEQ OY0 citations39
US10280508B2May 7, 2019
Nozzle head and apparatus for coating substrate surface
BENEQ OY0 citations38
US12421596B2Sep 23, 2025
Method and apparatus for processing surface of a semiconductor substrate
BENEQ OY0 citations37
US11578944B2Feb 14, 2023
Sight display device and method for manufacturing sight display device
BENEQ OY0 citations31
US10385450B2Aug 20, 2019
Method of coating a substrate and an apparatus
BENEQ OY0 citations30
US9987642B2Jun 5, 2018
Apparatus and method for producing aerosol and a focusing part
BENEQ OY0 citations29
US10576445B2Mar 3, 2020
Apparatus and method for processing particulate matter
BENEQ OY0 citations22