Inventor · disambiguated record
Hans Loeschner
Also filed as: LOESCHNER HANS
6 granted patents·308 citations·filing 1996–2010
86Inventor score
Files withIMS IONEN MIKROFAB SYST3IMS MIKROFABRIKATIONS SYSTEME1IMS NANOFABRICATION GMBH1PLATZGUMMER ELMAR1
Top patents by PatentIndex Score
6 records- 0198US8546767B2Pattern definition device with multiple multibeam arrayPLATZGUMMER ELMAR·Filed 2010·Granted Oct 1, 2013·58 cites·13 claims
- 0297US6768125B2Maskless particle-beam system for exposing a pattern on a substrateIMS NANOFABRICATION GMBH·Filed 2003·Granted Jul 27, 2004·186 cites·21 claims
- 0376US6909103B2Ion irradiation of a target at very high and very low kinetic ion energiesIMS IONEN MIKROFAB SYST·Filed 2004·Granted Jun 21, 2005·12 cites·11 claims
- 0463US6326632B1Particle-optical imaging system for lithography purposesIMS IONEN MIKROFAB SYST·Filed 1999·Granted Dec 4, 2001·23 cites·7 claims
- 0563US5742062AArrangement for masked beam lithography by means of electrically charged particlesIMS MIKROFABRIKATIONS SYSTEME·Filed 1996·Granted Apr 21, 1998·20 cites·40 claims
- 0650US5874739AArrangement for shadow-casting lithographyIMS IONEN MIKROFAB SYST·Filed 1997·Granted Feb 23, 1999·9 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →