Inventor · disambiguated record
Haiau Phanvu
Also filed as: PHANVU HAIAU
3 granted patents·12 citations·filing 2013–2019
62Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0181US9396963B2Mask removal process strategy for vertical NAND deviceMATTSON TECH INC·Filed 2014·Granted Jul 19, 2016·7 cites·21 claims
- 0277US10431469B2Method for high aspect ratio photoresist removal in pure reducing plasmaMATTSON TECH INC·Filed 2013·Granted Oct 1, 2019·5 cites·9 claims
- 0352US11107693B2Method for high aspect ratio photoresist removal in pure reducing plasmaBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2019·Granted Aug 31, 2021·0 cites·12 claims
Join the waitlist — get patent alerts
Get an alert when Haiau Phanvu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →