Inventor · disambiguated record
Haifeng Pu
Also filed as: PU HAIFENG
2 granted patents·1 pending application·0 citations·filing 2020–2021
22Inventor score
Files withKLA CORP3
Top patents by PatentIndex Score
3 records- 0140US11320746B1Method and system for manufacturing integrated circuitKLA CORP·Filed 2021·Granted May 3, 2022·0 cites·20 claims
- 0236US11966203B2System and method to adjust a kinetics model of surface reactions during plasma processingKLA CORP·Filed 2020·Granted Apr 23, 2024·0 cites·43 claims
- 0331US2022207713A1Method and system for manufacturing integrated circuitKLA CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →