Inventor · disambiguated record
Harumitsu Saito
Also filed as: SAITO HARUMITSU
7 granted patents·243 citations·filing 1981–2005
88Inventor score
Top patents by PatentIndex Score
7 records- 0192US5679059APolishing aparatus and methodEBARA CORP·Filed 1995·Granted Oct 21, 1997·110 cites·83 claims
- 0289US4419330AThermal reactor of fluidizing bed typeEBARA CORP·Filed 1981·Granted Dec 6, 1983·45 cites·15 claims
- 0378US6997782B2Polishing apparatus and a method of polishing and cleaning and drying a waferTOSHIBA KK·Filed 2002·Granted Feb 14, 2006·16 cites·20 claims
- 0470US7198552B2Polishing apparatusTOSHIBA KK·Filed 2005·Granted Apr 3, 2007·2 cites·18 claims
- 0569US4452155AMethod for incinerating materialEBARA CORP·Filed 1983·Granted Jun 5, 1984·18 cites·8 claims
- 0667US6500051B1Polishing apparatus and methodEBARA CORP·Filed 1997·Granted Dec 31, 2002·25 cites·57 claims
- 0767US5173041AMultistage vacuum pump with interstage solid material collector and cooling coilsEBARA CORP·Filed 1991·Granted Dec 22, 1992·27 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →