Inventor · disambiguated record
Hayato Sakai
Also filed as: SAKAI HAYATO
4 granted patents·2 pending applications·1 citations·filing 2021–2025
57Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0180US11817334B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Nov 14, 2023·1 cites·11 claims
- 0269US12500101B2Temperature control system and system of processing substrateTOKYO ELECTRON LTD·Filed 2023·Granted Dec 16, 2025·0 cites·18 claims
- 0369US2024053073A1Temperature control medium processing apparatus and temperature control medium processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0460US2025191899A1Temperature control system and plasma processing systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0559US11835278B2Temperature control medium processing apparatus and temperature control medium processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 5, 2023·0 cites·15 claims
- 0638US11920242B2Temperature control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Mar 5, 2024·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →