Inventor · disambiguated record
Hans-Michael Solowan
Also filed as: SOLOWAN HANS-MICHAEL
2 granted patents·1 pending application·2 citations·filing 2017–2023
35Inventor score
Files withZEISS CARL SMT GMBH3
Top patents by PatentIndex Score
3 records- 0166US10656537B2Method for detecting the position of a mask holder on a measuring tableZEISS CARL SMT GMBH·Filed 2018·Granted May 19, 2020·2 cites·19 claims
- 0252US2025069956A1Ion beam inspection and repair with increased secondary electron yieldZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0331US10733337B2Method and device for the simulation of a photolithographic process for generating a wafer structureZEISS CARL SMT GMBH·Filed 2017·Granted Aug 4, 2020·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →