Inventor · disambiguated record
Hanzhong Xiao
Also filed as: XIAO HANZHONG
2 granted patents·1 pending application·7 citations·filing 2003–2006
51Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0157US7049052B2Method providing an improved bi-layer photoresist patternLAM RES CORP·Filed 2003·Granted May 23, 2006·6 cites·15 claims
- 0243US2006166145A1Method providing an improved bi-layer photoresist patternXIAO HANZHONG·Filed 2006·Application pending·0 cites
- 0341US6949469B1Methods and apparatus for the optimization of photo resist etching in a plasma processing systemLAM RES CORP·Filed 2003·Granted Sep 27, 2005·1 cites·24 claims
Join the waitlist — get patent alerts
Get an alert when Hanzhong Xiao files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →