Inventor · disambiguated record
Halit Yakupoglu
Also filed as: YAKUPOGLU HALIT N
3 granted patents·1 pending application·82 citations·filing 2001–2005
71Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0193US6852630B2Electroetching process and systemASM NUTOOL INC·Filed 2001·Granted Feb 8, 2005·73 cites·23 claims
- 0258US7250104B2Method and system for optically enhanced metal planarizationNOVELLUS SYSTEMS INC·Filed 2003·Granted Jul 31, 2007·6 cites·14 claims
- 0351US7097755B2Electrochemical mechanical processing with advancible sweeperASM NUTOOL INC·Filed 2002·Granted Aug 29, 2006·3 cites·45 claims
- 0446US2005145489A1Electroetching process and systemFiled 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →