Inventor · disambiguated record
Haoquan Yan
Also filed as: YAN HAOQUAN
6 granted patents·4 pending applications·20 citations·filing 2015–2024
78Inventor score
Files withLAM RES CORP10
Top patents by PatentIndex Score
10 records- 0191US10658222B2Moveable edge coupling ring for edge process control during semiconductor wafer processingLAM RES CORP·Filed 2015·Granted May 19, 2020·7 cites·18 claims
- 0291US10541168B2Edge ring centering method using ring dynamic alignment dataLAM RES CORP·Filed 2017·Granted Jan 21, 2020·9 cites·19 claims
- 0386US11031215B2Vacuum pump protection against deposition byproduct buildupLAM RES CORP·Filed 2019·Granted Jun 8, 2021·3 cites·7 claims
- 0485US11710623B2Vacuum pump protection against deposition byproduct buildupLAM RES CORP·Filed 2021·Granted Jul 25, 2023·1 cites·11 claims
- 0582US2024355667A1Edge ring arrangement with moveable edge ringsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0679US12087561B2Vacuum pump protection against deposition byproduct buildupLAM RES CORP·Filed 2023·Granted Sep 10, 2024·0 cites·6 claims
- 0772US12027410B2Edge ring arrangement with moveable edge ringsLAM RES CORP·Filed 2021·Granted Jul 2, 2024·0 cites·18 claims
- 0859US2019013232A1Moveable edge ring designLAM RES CORP·Filed 2018·Application pending·0 cites
- 0951US2024379375A1Method and apparatus for etching a carbon containing layerLAM RES CORP·Filed 2022·Application pending·0 cites
- 1033US2019341275A1Edge ring focused deposition during a cleaning process of a processing chamberLAM RES CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →