Inventor · disambiguated record
Hermann Bieg
Also filed as: BIEG HERMANN
12 granted patents·5 pending applications·28 citations·filing 2003–2025
88Inventor score
Top patents by PatentIndex Score
17 records- 0186US10606179B2Projection exposure apparatus for semiconductor lithography with reduce thermal deformationZEISS CARL SMT GMBH·Filed 2019·Granted Mar 31, 2020·3 cites·17 claims
- 0281US10663873B2Mirror arrangement for microlithographic projection exposure apparatus and related methodZEISS CARL SMT GMBH·Filed 2016·Granted May 26, 2020·2 cites·26 claims
- 0380US7929227B2Optical assemblyZEISS CARL SMT GMBH·Filed 2010·Granted Apr 19, 2011·4 cites·29 claims
- 0476US7791826B2Optical assemblyZEISS CARL SMT AG·Filed 2006·Granted Sep 7, 2010·6 cites·63 claims
- 0574US2025314977A1Optical system and lithography systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0672US2025291176A1Mirror arrangement with cooled mirror elements and lithography systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0770US8089707B2Diaphragm changing deviceBIEG HERMANN·Filed 2010·Granted Jan 3, 2012·1 cites·23 claims
- 0866US8687169B2Optical aperture deviceBIEG HERMANN·Filed 2010·Granted Apr 1, 2014·1 cites·26 claims
- 0963US7763870B2Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elementsZEISS CARL SMT AG·Filed 2007·Granted Jul 27, 2010·1 cites·18 claims
- 1061US2025271781A1Assembly for an optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 1158US9341955B2Optical aperture deviceZEISS CARL SMT GMBH·Filed 2014·Granted May 17, 2016·0 cites·26 claims
- 1258US8009343B2Optical imaging device having at least one system diaphragmZEISS CARL SMT GMBH·Filed 2004·Granted Aug 30, 2011·6 cites·36 claims
- 1358US7684125B2Diaphragm changing deviceZEISS CARL SMT AG·Filed 2003·Granted Mar 23, 2010·4 cites·26 claims
- 1451US10139733B2Diaphragm changing deviceZEISS CARL SMT GMBH·Filed 2016·Granted Nov 27, 2018·0 cites·30 claims
- 1550US8570676B2Optical assemblyBIEG HERMANN·Filed 2011·Granted Oct 29, 2013·0 cites·29 claims
- 1650US2012075611A1Diaphragm changing deviceBIEG HERMANN·Filed 2011·Application pending·0 cites
- 1748US2010066990A1Imaging device with exchangeable diaphragms and method thereforZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →