Inventor · disambiguated record
Hee-Sun Chae
Also filed as: CHAE HEE SUN
14 granted patents·10 pending applications·212 citations·filing 1995–2017
92Inventor score
Top patents by PatentIndex Score
24 records- 0187US6604012B1Lots dispatching method for variably arranging processing equipment and/or processing conditions in a succeeding process according to the results of a preceding process and apparatus for the sameSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Aug 5, 2003·75 cites·27 claims
- 0277US7398801B2Apparatus and method for processing wafersSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Jul 15, 2008·6 cites·28 claims
- 0374US6370793B1Apparatus for controlling the temperature of a wafer located at a pre-alignment stageSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Apr 16, 2002·18 cites·30 claims
- 0472US6766210B2Process error prevention method in semiconductor fabricating equipmentSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Jul 20, 2004·21 cites·12 claims
- 0570US7598180B2Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated therebySAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Oct 6, 2009·4 cites·19 claims
- 0670US7101752B2Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated therebySAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Sep 5, 2006·14 cites·13 claims
- 0768US6445443B1Lithography system including mechanism for setting optimal process parameters and method of operating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Sep 3, 2002·10 cites·9 claims
- 0861US5672230ACentral management system of wet chemical stationsSAMSUNG ELECTRONICS CO LTD·Filed 1995·Granted Sep 30, 1997·26 cites·12 claims
- 0954US6027604ADry etching apparatus having upper and lower electrodes with grooved insulating rings or grooved chamber sidewallsSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Feb 22, 2000·25 cites·14 claims
- 1047US2013319615A1Apparatus and method for treating substratesPSK INC·Filed 2013·Application pending·0 cites
- 1146US10312060B2Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the samePSK INC·Filed 2014·Granted Jun 4, 2019·0 cites·14 claims
- 1246US2016013029A1Apparatus For Generating Plasma Using Dual Plasma Source And Apparatus For Treating Substrate Including The SamePSK INC·Filed 2014·Application pending·0 cites
- 1345US2017221720A1Apparatus and method for treating substratesPSK INC·Filed 2017·Application pending·0 cites
- 1445US2015136734A1Substrate Treating Apparatus and MethodPSK INC·Filed 2014·Application pending·0 cites
- 1544US2016013031A1Substrate Processing Device and Method of Handling Particles ThereofPSK INC·Filed 2014·Application pending·0 cites
- 1644US2016020073A1Plasma generation device, method of controlling characteristic of plasma, and substrate processing device using samePSK INC·Filed 2014·Application pending·0 cites
- 1743US9536708B2Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating devicePSK INC·Filed 2014·Granted Jan 3, 2017·0 cites·27 claims
- 1842US2007009815A1Method of wafer edge exposureSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 1940US2014318710A1Apparatus for generating plasma using electromagnetic field applicator and apparatus for treating substrate comprising the samePSK INC·Filed 2013·Application pending·0 cites
- 2038US2004165973A1Apparatus and method for processing wafersSAMSUNG ELECTRONICS CO LTD·Filed 2003·Application pending·0 cites
- 2135US5760693AVacuum apparatus for semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted Jun 2, 1998·5 cites·13 claims
- 2234US5816970ASemiconductor fabricating apparatus with remote belt tension sensorSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted Oct 6, 1998·5 cites·3 claims
- 2334US2004194920A1Apparatus for and method of heat-treating a waferFiled 2004·Application pending·0 cites
- 2432US5828039AMethod and apparatus for heating chemical used in microelectronic device fabricationSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted Oct 27, 1998·3 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →