Inventor · disambiguated record
Herschel M. Marchman
Also filed as: MARCHMAN HERSCHEL · MARCHMAN HERSCHEL M · MARCHMAN HERSCHEL MACLYN
23 granted patents·5 pending applications·495 citations·filing 1993–2012
96Inventor score
Top patents by PatentIndex Score
28 records- 0195US7304302B1Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysisKLA TENCOR TECH CORP·Filed 2005·Granted Dec 4, 2007·55 cites·46 claims
- 0290US6787783B2Apparatus and techniques for scanning electron beam based chip repairIBM·Filed 2002·Granted Sep 7, 2004·53 cites·20 claims
- 0389US5426302AOptically guided macroscopic-scan-range/nanometer resolution probing systemREGENTS UNIVERSITY OF TEXAS BO·Filed 1993·Granted Jun 20, 1995·77 cites·13 claims
- 0488US5394500AFiber probe device having multiple diametersAT & T CORP·Filed 1993·Granted Feb 28, 1995·66 cites·12 claims
- 0587US7351966B1High-resolution optical channel for non-destructive navigation and processing of integrated circuitsIBM·Filed 2006·Granted Apr 1, 2008·11 cites·20 claims
- 0685US7329361B2Method and apparatus for fabricating or altering microstructures using local chemical alterationsIBM·Filed 2003·Granted Feb 12, 2008·24 cites·16 claims
- 0783US5480046AFiber probe fabrication having a tip with concave sidewallsAT & T CORP·Filed 1994·Granted Jan 2, 1996·33 cites·24 claims
- 0880US5570441ACylindrical fiber probes and methods of making themAT & T CORP·Filed 1994·Granted Oct 29, 1996·30 cites·13 claims
- 0978US7961397B2Single-channel optical processing system for energetic-beam microscopesOMNIPROBE INC·Filed 2008·Granted Jun 14, 2011·5 cites·40 claims
- 1071US5656182AProcess for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materialsLUCENT TECHNOLOGIES INC·Filed 1995·Granted Aug 12, 1997·31 cites·7 claims
- 1169US5703979ACylindrical fiber probe devicesLUCENT TECHNOLOGIES INC·Filed 1995·Granted Dec 30, 1997·31 cites·14 claims
- 1268US7781733B2In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniquesIBM·Filed 2007·Granted Aug 24, 2010·2 cites·20 claims
- 1357US5395741AMethod of making fiber probe devices using patterned reactive ion etchingAT & T CORP·Filed 1993·Granted Mar 7, 1995·20 cites·19 claims
- 1456US8181594B2Method and apparatus for fabricating or altering microstructures using local chemical alterationsGUHA SUPRATIK·Filed 2007·Granted May 22, 2012·0 cites·20 claims
- 1556US2010068408A1Methods for electron-beam induced deposition of material inside energetic-beam microscopesOMNIPROBE INC·Filed 2008·Application pending·0 cites
- 1655US8999458B2Method and apparatus for fabricating or altering microstructures using local chemical alterationsGUHA SUPRATIK·Filed 2012·Granted Apr 7, 2015·0 cites·19 claims
- 1752US5693938AOptical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfacesLUCENT TECHNOLOGIES INC·Filed 1996·Granted Dec 2, 1997·17 cites·15 claims
- 1852US5531343ACylindrical fiber probe devices and methods of making themAT & T CORP·Filed 1994·Granted Jul 2, 1996·12 cites·13 claims
- 1947US8054558B2Multiple magnification optical system with single objective lensOMNIPROBE INC·Filed 2010·Granted Nov 8, 2011·0 cites·12 claims
- 2045US5709803ACylindrical fiber probes and methods of making themLUCENT TECHNOLOGIES INC·Filed 1995·Granted Jan 20, 1998·8 cites·22 claims
- 2145US2010200546A1Method of etching materials with electron beam and laser energyOMNIPROBE INC·Filed 2010·Application pending·0 cites
- 2242US5811796AOptical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfacesLUCENT TECHNOLOGIES INC·Filed 1997·Granted Sep 22, 1998·10 cites·4 claims
- 2342US5480049AMethod for making a fiber probe device having multiple diametersAT & T CORP·Filed 1994·Granted Jan 2, 1996·8 cites·8 claims
- 2441US6843893B2Metal dry etch using electronic fieldIBM·Filed 2002·Granted Jan 18, 2005·0 cites·13 claims
- 2538US2005016954A1System and methods of altering a very small surface areaIBM·Filed 2003·Application pending·0 cites
- 2638US2004060904A1Tool having a plurality of electrodes and corresponding method of altering a very small surfaceIBM·Filed 2002·Application pending·0 cites
- 2738US2005016952A1System and method of altering a very small surface area by multiple channel probeIBM·Filed 2003·Application pending·0 cites
- 2837US5676852ACylindrical fiber probes and methods of making themLUCENT TECHNOLOGIES INC·Filed 1996·Granted Oct 14, 1997·2 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →