Inventor · disambiguated record
Henry Megens
Also filed as: MEGENS HENRY
10 granted patents·130 citations·filing 2003–2010
91Inventor score
Top patents by PatentIndex Score
10 records- 0196US7880880B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2005·Granted Feb 1, 2011·24 cites·15 claims
- 0295US7329888B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2005·Granted Feb 12, 2008·18 cites·28 claims
- 0393US7297971B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2005·Granted Nov 20, 2007·12 cites·3 claims
- 0492US8139217B2Alignment systems and methods for lithographic systemsVAN BILSEN FRANCISCUS BERNARDUS MARIA·Filed 2010·Granted Mar 20, 2012·12 cites·18 claims
- 0590US7439531B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2006·Granted Oct 21, 2008·7 cites·32 claims
- 0690US7332732B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2003·Granted Feb 19, 2008·22 cites·143 claims
- 0788US7330261B2Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Granted Feb 12, 2008·19 cites·37 claims
- 0884US7619738B2Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 17, 2009·4 cites·25 claims
- 0968US7453161B2Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 18, 2008·3 cites·15 claims
- 1057US7271073B2Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatusASML NERTHERLANDS B V·Filed 2004·Granted Sep 18, 2007·9 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →