Inventor · disambiguated record
Hemant P. Mungekar
Also filed as: MUNGEKAR HEMANT · MUNGEKAR HEMANT P
20 granted patents·19 pending applications·853 citations·filing 2003–2024
94Inventor score
Top patents by PatentIndex Score
39 records- 0198US7678715B2Low wet etch rate silicon nitride filmAPPLIED MATERIALS INC·Filed 2007·Granted Mar 16, 2010·516 cites·25 claims
- 0296US7628897B2Reactive ion etching for semiconductor device feature topography modificationAPPLIED MATERIALS INC·Filed 2003·Granted Dec 8, 2009·230 cites·28 claims
- 0393US7799704B2Gas baffle and distributor for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2008·Granted Sep 21, 2010·15 cites·10 claims
- 0491US7745350B2Impurity control in HDP-CVD DEP/ETCH/DEP processesAPPLIED MATERIALS INC·Filed 2008·Granted Jun 29, 2010·13 cites·12 claims
- 0591US7740706B2Gas baffle and distributor for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2006·Granted Jun 22, 2010·19 cites·19 claims
- 0682US8168462B2Passivation process for solar cell fabricationBORDEN PETER·Filed 2009·Granted May 1, 2012·7 cites·19 claims
- 0780US7867921B2Reduction of etch-rate drift in HDP processesAPPLIED MATERIALS INC·Filed 2008·Granted Jan 11, 2011·7 cites·19 claims
- 0878US10636630B2Processing chamber and method with thermal controlAPPLIED MATERIALS INC·Filed 2018·Granted Apr 28, 2020·2 cites·15 claims
- 0978US7329586B2Gapfill using deposition-etch sequenceAPPLIED MATERIALS INC·Filed 2005·Granted Feb 12, 2008·6 cites·19 claims
- 1076US7704897B2HDP-CVD SiON films for gap-fillAPPLIED MATERIALS INC·Filed 2008·Granted Apr 27, 2010·7 cites·27 claims
- 1175US2025123186A1Method and system for detecting anomalies in a semiconductor processing systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1273US7141138B2Gas delivery system for semiconductor processingAPPLIED MATERIALS INC·Filed 2003·Granted Nov 28, 2006·13 cites·16 claims
- 1370US7229931B2Oxygen plasma treatment for enhanced HDP-CVD gapfillAPPLIED MATERIALS INC·Filed 2004·Granted Jun 12, 2007·16 cites·20 claims
- 1469US11437262B2Wafer de-chucking detection and arcing preventionAPPLIED MATERIALS INC·Filed 2018·Granted Sep 6, 2022·1 cites·14 claims
- 1568US12002702B2Wafer de-chucking detection and arcing preventionAPPLIED MATERIALS INC·Filed 2022·Granted Jun 4, 2024·0 cites·20 claims
- 1663US7498268B2Gas delivery system for semiconductor processingAPPLIED MATERIALS INC·Filed 2006·Granted Mar 3, 2009·1 cites·9 claims
- 1761US12203828B2Method and system for detecting anomalies in a semiconductor processing systemAPPLIED MATERIALS INC·Filed 2021·Granted Jan 21, 2025·0 cites·14 claims
- 1860US2008124944A1Gas baffle and distributor for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 1959US2007062449A1Enhanced magnetic shielding for plasma-based semiconductor processing toolAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 2058US11355325B2Methods and systems for monitoring input power for process control in semiconductor process systemsAPPLIED MATERIALS INC·Filed 2020·Granted Jun 7, 2022·0 cites·17 claims
- 2158US2014000686A1Film stack and process design for back passivated solar cells and laser opening of contactAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 2258US2013247972A1Passivation film stack for silicon-based solar cellsAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 2357US2013109133A1Rear-point-contact process or photovoltaic cellsFREI MICHEL R·Filed 2012·Application pending·0 cites
- 2455US2010051085A1Back contact solar cell modulesWEIDMAN TIMOTHY W·Filed 2009·Application pending·0 cites
- 2555US2014127404A1Apparatus For Spatial Atomic Layer Deposition With Recirculation And Methods Of UseYUDOVSKY JOSEPH·Filed 2013·Application pending·0 cites
- 2652US2011272008A1Oxide nitride stack for backside reflector of solar cellAPPLIED MATERIALS INC·Filed 2011·Application pending·0 cites
- 2752US2011240114A1Method of forming a negatively charged passivation layer over a diffused p-type regionAPPLIED MATERIALS INC·Filed 2011·Application pending·0 cites
- 2852US2013059092A1Method and apparatus for gas distribution and plasma application in a linear deposition chamberMUNGEKAR HEMANT P·Filed 2012·Application pending·0 cites
- 2952US2011272024A1MULTI-LAYER SiN FOR FUNCTIONAL AND OPTICAL GRADED ARC LAYERS ON CRYSTALLINE SOLAR CELLSAPPLIED MATERIALS INC·Filed 2011·Application pending·0 cites
- 3051US2013273262A1Static deposition profile modulation for linear plasma sourceVELLAIKAL MANOJ·Filed 2012·Application pending·0 cites
- 3150US11004710B2Wafer placement error detection based on measuring a current through an electrostatic chuck and solution for interventionAPPLIED MATERIALS INC·Filed 2019·Granted May 11, 2021·0 cites·20 claims
- 3247US2008029484A1In-situ process diagnostics of in-film aluminum during plasma depositionAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 3345US10777394B2Virtual sensor for chamber cleaning endpointAPPLIED MATERIALS INC·Filed 2017·Granted Sep 15, 2020·0 cites·20 claims
- 3445US2008299775A1Gapfill extension of hdp-cvd integrated process modulation sio2 processAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 3544US2021375701A1Methods and systems for processing a substrateAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3643US11024522B2Virtual sensor for spatially resolved wafer temperature controlAPPLIED MATERIALS INC·Filed 2019·Granted Jun 1, 2021·0 cites·21 claims
- 3739US2004231798A1Gas delivery system for semiconductor processingAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 3839US2005260356A1Microcontamination abatement in semiconductor processingAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 3938US2013171757A1Advanced platform for passivating crystalline silicon solar cellsPONNEKANTI HARI K·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →