Inventor · disambiguated record
Hendrik Steigerwald
Also filed as: STEIGERWALD HENDRIK
2 granted patents·0 citations·filing 2018–2021
27Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0164US11774848B2Method and apparatus for repairing defects of a photolithographic mask for the EUV rangeZEISS CARL SMT GMBH·Filed 2021·Granted Oct 3, 2023·0 cites·23 claims
- 0251US11079673B2Method and apparatus for repairing defects of a photolithographic mask for the EUV rangeZEISS CARL SMT GMBH·Filed 2018·Granted Aug 3, 2021·0 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →