Inventor · disambiguated record
Helmar Van Santen
Also filed as: VAN SANTEN HELMAR
88 granted patents·13 pending applications·3,968 citations·filing 2000–2019
99Inventor score
Files withASML NETHERLANDS BV56KONINKL PHILIPS ELECTRONICS NV17LOF JOERI10HOOGENDAM CHRISTIAAN ALEXANDER4KOLESNYCHENKO ALEKSEY YURIEVICH3
Top patents by PatentIndex Score
101 records- 0199US9740107B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Aug 22, 2017·10 cites·20 claims
- 0299US9366972B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 14, 2016·14 cites·20 claims
- 0399US8482845B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jul 9, 2013·32 cites·16 claims
- 0499US7593092B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 22, 2009·60 cites·15 claims
- 0599US7593093B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 22, 2009·67 cites·9 claims
- 0699US7388648B2Lithographic projection apparatusASML NETHERLANDS BV·Filed 2005·Granted Jun 17, 2008·136 cites·20 claims
- 0799US7213963B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 8, 2007·196 cites·28 claims
- 0899US7199858B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 3, 2007·409 cites·29 claims
- 0999US6952253B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 4, 2005·1.8k cites·45 claims
- 1098US7394521B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 1, 2008·160 cites·32 claims
- 1198US7372541B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·74 cites·32 claims
- 1298US7119874B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 10, 2006·143 cites·48 claims
- 1398US7050146B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 23, 2006·165 cites·33 claims
- 1497US10527955B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Jan 7, 2020·4 cites·20 claims
- 1597US7514699B2Method and device for irradiating spots on a layerKONINKL PHILIPS ELECTRONICS NV·Filed 2003·Granted Apr 7, 2009·74 cites·13 claims
- 1696US8154708B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2006·Granted Apr 10, 2012·23 cites·20 claims
- 1796US7411653B2Lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Aug 12, 2008·49 cites·20 claims
- 1896US6396637B2Image display device and method of manufacturing a light conductor for such an image display deviceKONINKL PHILIPS ELECTRONICS NV·Filed 2001·Granted May 28, 2002·151 cites·9 claims
- 1995US8542344B2Lithographic apparatus and device manufacturing methodHOOGENDAM CHRISTIAAN ALEXANDER·Filed 2011·Granted Sep 24, 2013·7 cites·37 claims
- 2095US8472002B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jun 25, 2013·7 cites·28 claims
- 2195US7982850B2Immersion lithographic apparatus and device manufacturing method with gas supplyASML NETHERLANDS BV·Filed 2008·Granted Jul 19, 2011·14 cites·20 claims
- 2295US7618250B2Imprint lithographyASML NETHERLANDS BV·Filed 2006·Granted Nov 17, 2009·22 cites·16 claims
- 2394US9817321B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 14, 2017·3 cites·20 claims
- 2494US7399978B2Method and device for irradiating spots on a layerKONINKL PHILIPS ELECTRONICS NV·Filed 2003·Granted Jul 15, 2008·62 cites·8 claims
- 2593US9684250B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jun 20, 2017·3 cites·20 claims
- 2693US9091940B2Lithographic apparatus and method involving a fluid inlet and a fluid outletASML NETHERLANDS BV·Filed 2012·Granted Jul 28, 2015·5 cites·71 claims
- 2793US8797503B2Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structureLOF JOERI·Filed 2011·Granted Aug 5, 2014·5 cites·20 claims
- 2893US7868998B2Lithographic apparatusASML NETHERLANDS BV·Filed 2008·Granted Jan 11, 2011·9 cites·12 claims
- 2993US7354698B2Imprint lithographyASML NETHERLANDS BV·Filed 2005·Granted Apr 8, 2008·26 cites·71 claims
- 3092US7418902B2Imprint lithography including alignmentASML NETHERLANDS BV·Filed 2005·Granted Sep 2, 2008·24 cites·26 claims
- 3191US9829799B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 28, 2017·2 cites·20 claims
- 3291US7358507B2Liquid removal in a method and device for irradiating spots on a layerKONINKL PHILIPS ELECTRONICS NV·Filed 2003·Granted Apr 15, 2008·31 cites·10 claims
- 3390US9465301B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Oct 11, 2016·3 cites·20 claims
- 3489US7898642B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 1, 2011·19 cites·41 claims
- 3588US8558989B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Oct 15, 2013·3 cites·33 claims
- 3688USRE42849ELithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Oct 18, 2011·8 cites·45 claims
- 3787US10503084B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 10, 2019·2 cites·20 claims
- 3887US10234768B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Mar 19, 2019·1 cites·20 claims
- 3986US10620545B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Apr 14, 2020·1 cites·20 claims
- 4085US8767171B2Lithographic apparatus and device manufacturing methodVAN SANTEN HELMAR·Filed 2010·Granted Jul 1, 2014·3 cites·28 claims
- 4185US7692771B2Imprint lithographyASML NETHERLANDS BV·Filed 2005·Granted Apr 6, 2010·7 cites·16 claims
- 4283US7710541B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted May 4, 2010·5 cites·20 claims
- 4381US7523701B2Imprint lithography method and apparatusASML NETHERLANDS BV·Filed 2005·Granted Apr 28, 2009·3 cites·20 claims
- 4481US6649093B2Method of manufacturing an optically scannable information carrierKONINKL PHILIPS ELECTRONICS NV·Filed 2001·Granted Nov 18, 2003·43 cites·18 claims
- 4580US7611348B2Imprint lithographyASML NETHERLANDS BV·Filed 2005·Granted Nov 3, 2009·5 cites·19 claims
- 4678US8860923B2Lithographic apparatus and device manufacturing methodHOOGENDAM CHRISTIAAN ALEXANDER·Filed 2011·Granted Oct 14, 2014·1 cites·20 claims
- 4778US8105422B2Cyclonic liquid degassing separator and method for degassing a fluid mixtureBETTING MARCO·Filed 2007·Granted Jan 31, 2012·10 cites·23 claims
- 4877US7935213B2Non-leaching adhesive system and its use in a liquid immersion objectiveKONINKL PHILIPS ELECTRONICS NV·Filed 2009·Granted May 3, 2011·2 cites·15 claims
- 4976US10768538B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Sep 8, 2020·0 cites·20 claims
- 5074US10788755B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Sep 29, 2020·0 cites·19 claims
Showing the top 50 of 101 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →