Inventor · disambiguated record
Heiko Wagner
Also filed as: WAGNER HEIKO
6 granted patents·1 pending application·26 citations·filing 2003–2023
73Inventor score
Top patents by PatentIndex Score
7 records- 0181US7325224B2Method and system for increasing product yield by controlling lithography on the basis of electrical speed dataADVANCED MICRO DEVICES INC·Filed 2004·Granted Jan 29, 2008·22 cites·41 claims
- 0253US7006195B2Method and system for improving exposure uniformity in a step and repeat processADVANCED MICRO DEVICES INC·Filed 2003·Granted Feb 28, 2006·4 cites·2 claims
- 0353US2024219700A1Controller for a microscope, microscope system and corresponding methodLEICA MICROSYSTEMS·Filed 2023·Application pending·0 cites
- 0441US7346407B2Method of operating an advanced process controller by dynamically adapting hierarchy levelsADVANCED MICRO DEVICES INC·Filed 2005·Granted Mar 18, 2008·0 cites·6 claims
- 0535US10146132B2Mobile dispense device for chemicals used in micro-processingGLOBALFOUNDRIES INC·Filed 2017·Granted Dec 4, 2018·0 cites·17 claims
- 0634US7962459B2Method of providing context specific recipes in a semiconductor facility by defining product categoriesGLOBALFOUNDRIES INC·Filed 2003·Granted Jun 14, 2011·0 cites·20 claims
- 0732US10007198B2Method including an adjustment of a plurality of wafer handling elements, system including a plurality of wafer handling elements and photolithography trackGLOBALFOUNDRIES INC·Filed 2016·Granted Jun 26, 2018·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →