Inventor · disambiguated record
Hikaru Akada
Also filed as: AKADA HIKARU
5 granted patents·2 pending applications·10 citations·filing 2011–2024
65Inventor score
Top patents by PatentIndex Score
7 records- 0179US9268739B2Data acquisition method in substrate processing apparatus and sensor substrateAKADA HIKARU·Filed 2011·Granted Feb 23, 2016·10 cites·20 claims
- 0258US2024393706A1Processing liquid supply apparatus and processing liquid supply methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0342US11217468B2Substrate treatment apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jan 4, 2022·0 cites·14 claims
- 0440US11521854B2Processing liquid supply system, processing liquid supply apparatus, and carrier storage apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Dec 6, 2022·0 cites·13 claims
- 0540US9389242B2Method for obtaining data of substrate processing apparatus and sensor substrateTOKYO ELECTRON LTD·Filed 2013·Granted Jul 12, 2016·0 cites·19 claims
- 0634US9915677B2Data acquisition method of substrate processing apparatus and sensing substrateAKADA HIKARU·Filed 2012·Granted Mar 13, 2018·0 cites·8 claims
- 0729US2012084059A1Data acquisition method of substrate treatment apparatus and sensor substrateAKADA HIKARU·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →