Inventor · disambiguated record
Hideharu Aoyama
Also filed as: AOYAMA HIDEHARU
5 granted patents·1 pending application·0 citations·filing 2017–2025
58Inventor score
Files withEBARA CORP6
Top patents by PatentIndex Score
6 records- 0174US2025367711A1Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2025·Application pending·0 cites
- 0262US12403507B2Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2021·Granted Sep 2, 2025·0 cites·10 claims
- 0346US12237194B2Substrate transporter and substrate processing apparatus including substrate transporterEBARA CORP·Filed 2019·Granted Feb 25, 2025·0 cites·29 claims
- 0446US11773504B2Plating support system, plating support device, and recording mediumEBARA CORP·Filed 2021·Granted Oct 3, 2023·0 cites·34 claims
- 0545US10577714B2Plating apparatus and plating methodEBARA CORP·Filed 2017·Granted Mar 3, 2020·0 cites·15 claims
- 0636US10446422B2Method of controlling display of operation of semiconductor manufacturing apparatus and non-transitory computer readable storage medium therefor, and system for performing display concerning operation of semiconductor manufacturing apparatusEBARA CORP·Filed 2018·Granted Oct 15, 2019·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →